★【Magnetron Sputtering Cathode】★ Thermocera Japan

High-efficiency magnetron sputtering cathode compatible with RF, DC, and pulse DC, capable of depositing metals and insulators without impurities. It also excels in maintenance.
【Features】
- Compatible with high vacuum
- Sizes: Φ2inch, Φ3inch, Φ4inch
- Adopts a clamp ring type, no bonding required
- Excellent maintenance, allowing for easy target replacement
- Abundant options such as shutters, chimney ports, gas injection, high-strength magnets for magnetic materials, etc.
- Compatible with various flange sizes
【Main Specifications】
- Compatible with RF, DC, and pulse DC
- Target thickness: 1/16" to 1/4"
- N-type coaxial connector
- Water-cooled: 4ℓ/min, 0.35Mpa Φ6mm tube connection
- Case material: SUS304
- Target clamp material: Al or SUS304
- Bellows (*Flexi-head type) material: SUS316
- Insulation material: PEEK/PTFE
- Seal material: Viton
- High-strength magnet pack: NiFe

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High-performance magnetron cathode suitable for RF, DC, and pulse DC, ideal for additional installation and modification of existing equipment.