New feature "IntelliLink" remote software released for the ★IntelliLink★ nanoPVD film experimental device!

We have released dedicated remote management software "IntelliLink" for the nanoPVD-S10A magnetron sputtering system, the nanoPVD-T15A metal/organic film deposition system, and the nanoPVD-ST15A composite thin film experimental system. In addition to the control software "IntelliDep," which allows centralized management of device operation and film formation control via the included 7" touch panel, the new optional IntelliLink enables remote management using a Windows PC. With IntelliLink, almost all operations, except for the main controls of the device (vacuum pumping, vent operation, interlock monitoring), can be performed from a PC.
(1) System live monitoring (device operation status monitor)
- Chamber pressure, MFC flow rate settings
- Film thickness display, settings, calibration
- Stage rotation, heating, shutter opening and closing operations
(2) Error analysis
(3) Recipe creation, saving, uploading
(4) Data logging, CSV format output → data sharing with other devices
◉ Connect using the included USB cable to the Ethernet port on the back of the device.


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Windows PC remote software for the compact thin film experimental device nanoPVD