★【Magnetron Sputtering Cathode】★ Thermocera Japan

High-efficiency magnetron sputtering cathode compatible with RF, DC, and pulse DC, capable of depositing metals, insulators, and other materials without impurities. It also excels in maintainability.
【Features】
- Compatible with high vacuum
- Sizes: Φ2 inch, Φ3 inch, Φ4 inch
- Adopts a clamp ring type, no bonding required
- Excellent maintainability, allowing for easy target replacement
- Rich options including shutters, chimney ports, gas injection, high-strength magnets for magnetic materials, etc.
- Compatible with various flange sizes
【Main Specifications】
■ Compatible with RF, DC, and pulse DC
■ Target thickness: 1/16" to 1/4"
■ N-type coaxial connector
■ Water-cooled: 4ℓ/min, 0.35Mpa Φ6mm tube connection
■ Case material: SUS304
■ Target clamp material: Al or SUS304
■ Bellows (*Flexi-head type) material: SUS316
■ Insulating material: PEEK/PTFE
■ Seal material: Viton
■ High-strength magnet pack: NiFe

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High-performance magnetron cathode suitable for RF, DC, and pulse DC applications, ideal for additional installation or modification of existing equipment.