★【MiniLab-060】Flexible Thin Film Experimental Device★ Thermosera Japan

Compact/Space-saving, High-spec
60ℓ volume, a multi-thin film experimental device that can accommodate various applications by integrating thin film modules such as evaporation, sputtering, EB, and annealing.
Compact/Space-saving, High-spec thin film experimental device.
Combinations possible from the following evaporation sources:
- Resistance heating evaporation source x up to 4
- Organic evaporation source x up to 4
- Electron beam evaporation
- 2-inch magnetron sputtering cathode x 4
- Plasma etching: can be installed in either the main chamber or the load lock chamber.
【Small Footprint/Space-saving】
- Dual rack type (MiniLab-060): 1200(W) x 590(D)mm
【Excellent Operability/Intuitive Operation Screen】
Windows PC or 7” touch panel. Easy operation regardless of skill level, with a strong emphasis on safety.


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Due to its modular design, it is possible to assemble a dedicated machine tailored to your desired film type and process. A flexible small-scale experimental device that can accommodate various applications.