BH Series [UHV Compatible Ultra-High Temperature Vacuum Thin Film Experiment Substrate Heater] Max 1800℃

It can be applied to various vacuum thin film experiments such as PVD (sputtering, evaporation, EB, etc.), CVD, high-temperature vacuum annealing, and high-temperature sample analysis substrate stages. We can customize it to meet various specifications as per your requests.
【Features】
● It is a semi-custom product. We will design and manufacture it according to your needs.
● Easy replacement of the auxiliary heater wire.
● Easy installation and maintenance (M6 stud bolts, supports).
● Supports RF/DC bias and substrate rotation.
【Standard Accessories】
● Thermocouple: wire type with alumina insulating sleeve.
● Mounting stud bolts.
【Options】
● RF (150W)/DC (1KW) bias application.
● Non-standard heater wires (Nb, Mo, Pt/Re, WRe, etc.).
● Substrate holding clips.
● Mounting brackets.
● Substrate holders.
● Tapped holes for holder installation.
● Change of top plate material (PBN, quartz, carbon, Inconel, etc.).
● Additional thermocouples for overheating.
● Base flange and vacuum feedthrough.


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Compatible with high vacuum, with three types of heater material options. Can be applied to PVD (sputtering, evaporation, EB, etc.), high-temperature vacuum annealing, high-temperature analysis substrate stages, and more.