★☆★☆ MiniLab Series Flexible Thin Film Experimental Device ★☆★☆

The MiniLab thin film experimental device allows for the construction of a compact, semi-customized system that eliminates waste by incorporating the optimal components and control modules according to the required film formation methods and materials from a wide range of options. By equipping a modular control unit with a Plug&Play feel, the application range expands, enabling various thin film process experiments.
【MiniLab Thin Film Experimental Device Configuration Modules】
◎ Manufacturing Range
Resistance heating deposition (TE), organic deposition (LTE), electron beam deposition (EB), sputtering (SP), CVD, dry etching
【Small Footprint & Space-Saving】
- Single rack type (026): 590(W) x 590(D) mm
- Dual rack type (060): 1200(W) x 590(D) mm
- Triple rack type (125): 1770(W) x 755(D) mm
【Excellent Operability & Intuitive Operation Screen】
Windows PC or 7” touch panel. Easy operation that does not require advanced skills, with maximum consideration for safety. All operations except for internal component adjustments and material exchanges in the chamber are performed via the PC/HMI screen.


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PVD (resistive heating evaporation: metals, organics, EB evaporation, sputtering), RF/DC etching, and annealing. Due to the modular design, it is possible to assemble a dedicated machine according to the desired film type and process. A flexible and compact experimental device that can accommodate various applications.