★☆★☆【MiniLab-026】Flexible Thin Film Experimental Device for R&D★☆★☆

This is a flexible thin-film experimental device for R&D that achieves minimal waste, compact size, simple operation, and high cost performance by integrating the necessary minimum modules and controllers into a 19" compact rack with a Plug&Play feel. It supports magnetron sputtering (up to 3 sources) or resistance heating evaporation (metal sources up to 2, organic materials x4), and can also be equipped with a substrate heating stage, allowing for the production of annealing devices and RF etching. There is also a glove box storage type available (specifications to be discussed). We offer a wide range of optional components that can be flexibly customized.
◉ Φ2 inch magnetron cathode (up to 3 sources)
◉ Resistance heating evaporation source filament, crucible, boat type (up to 4 poles with automatic switching via controller)
◉ Organic evaporation cell: 1cc or 5cc
◉ Can be equipped with a glove box (optional, specifications to be discussed)
◉ Other options:
Simultaneous film deposition, HiPIMS, automatic film deposition controller, custom substrate holders, load lock, substrate rotation/heating/cooling, and many other options available.
*Please first contact us with your required specifications, and we will configure the system according to your needs.


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Due to its modular design, it is possible to assemble a dedicated machine according to the desired film type and process. A flexible and compact experimental device that can accommodate various applications.