BH Series [UHV Compatible Ultra-High Temperature Vacuum Thin Film Experiment Substrate Heater] Max 1800℃

High vacuum compatible with a variety of heater material options.
Can be applied to PVD (sputtering, evaporation, EB, etc.), high-temperature vacuum annealing, high-temperature analysis substrate stages, and more.
Custom-made to meet various specifications and requests.
【Features】
● Easy replacement of the spare heater wire
● Easy installation and maintenance (M6 stud bolts, supports)
【Compatible Substrate Sizes】
◉ Φ1 inch to Φ6 inch
【Standard Accessories】
● Thermocouple: wire type with alumina insulated sleeve
● Mounting stud bolts
【Options】
● Non-standard heater wires (Nb, Mo, Pt/Re, WRe, etc.)
● Substrate holding clips
● Mounting brackets
● Substrate holders
● Tapped hole processing for holder installation
● Change of top plate material (PBN, quartz, carbon, Inconel, etc.)
● Additional thermocouples for overheating
● Base flange, vacuum feedthrough terminal


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Compatible with high vacuum, offering three types of heater material options. It can be applied to PVD (sputtering, evaporation, EB, etc.), high-temperature vacuum annealing, high-temperature analysis substrate stages, and more.