★☆★☆【MiniLab-026】Small Thin Film Experimental Device for R&D Development★☆★☆

This is a flexible thin-film experimental device for R&D that eliminates waste by integrating the necessary minimum modules and controllers into a 19" compact rack with a Plug&Play feel, achieving a compact, space-saving design, simple operation, and high cost performance. It supports magnetron sputtering (up to 3 sources) or resistance heating evaporation (metal sources up to 2, organic materials up to 4), and can be equipped with a substrate heating stage for annealing devices and RF etching. A glove box storage type is also available (specifications to be discussed). We offer a wide range of optional components that can be flexibly customized.
◉ Φ2 inch magnetron cathode (up to 3 sources)
◉ Resistance heating evaporation source filaments, crucibles, boat type (up to 4 poles with automatic switching via controller)
◉ Organic evaporation cell: 1cc or 5cc
◉ Glove box compatible (optional, specifications to be discussed)
◉ Other options:
Simultaneous film deposition, HiPIMS, automatic film deposition controller, custom substrate holders, load lock, substrate rotation/heating/cooling, and many other options available.
*Please first contact us with your required specifications, and we will configure the system according to your needs.


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Due to its modular design, it is possible to assemble a dedicated machine tailored to your desired film type and process. A flexible, compact experimental device that can accommodate various applications.