日本エム・ケー・エス List of Products and Services

This is an introduction to Japan MKS Corporation, which develops, manufactures, and supplies instruments, components, and subsystems for the measurement, control, and analysis of gases used in various manufacturing processes, including semiconductor and FPD manufacturing, as well as the development, manufacturing, and supply of reactive gas generators and power supplies. *For more details, please refer to the PDF document or feel free to contact us.*

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The "High-Precision Pressure Measuring Instrument" is a system based on capacitance diaphragm sensor technology and solid-state electronics. Equipped with functions required in cutting-edge processes and measurement fields, it supports high-precision measurement regardless of manufacturing lines or measurement laboratories. The MKS high-precision Baratron, which has a long-standing reputation as a standard model for pressure measurement in manufacturing and research environments, offers various pressure ranges, accuracy, options, and accessories, allowing users to select specifications suitable for their applications. 【Features】 ■ Achieves excellent temperature stability with a very low temperature coefficient ■ Provides high-precision pressure measurement among sensors of the same type ■ Measurement is performed with a set of Type 670B signal conditioner and sensor ■ Suitable as a secondary standard for pressure calibration ■ Capable of measuring multiple sensors with a single unit by performing 6-digit measurements (with resolution limitations) *For more details, please refer to the PDF document or feel free to contact us.

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The "AIRGARD CWA/TIC" is an ultra-high sensitivity gas analyzer that rapidly detects toxic gases using Fourier Transform Infrared Spectroscopy. It is capable of detecting most CWAs and TICs at ppb levels below toxic IDLH levels within 20 seconds. With its low-level detection capability and fast response, it ensures sufficient time for appropriate actions in the event of a shutdown of the air conditioning system, indoor evacuation, or evacuation from a disaster area. Thorough testing has been conducted by the U.S. Department of Defense to prevent unnecessary outdoor evacuations, associated business shutdowns, and emergency notifications. 【Features】 ■ Detection limit in the low ppb range - identifies and alerts a wide range of harmful substances ■ Standard time to issue alerts and identify harmful chemicals is less than 20 seconds ■ Self-contained unit with built-in computer and sampling pump ■ Continuous atmospheric monitoring capability (7 days a week / 24 hours a day) ■ Remote troubleshooting capability *For more details, please refer to the PDF document or feel free to contact us.

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The "Type AA07A/Type AA08A" is a high-precision pressure transducer with excellent value and performance. It can be used over a wide temperature range due to its robust sensor housing made of Incoloy, which has an extremely low thermal coefficient. High precision, long-term stability, and low thermal coefficient ensure the measurement reproducibility required for modern gas measurement applications. 【Features】 ■ Excellent value and performance ■ The gas contact part is made of Incoloy, suitable for measuring corrosive gases and liquids ■ Available in output types of 0-5VDC, 0-10 VDC, and 4-20mA two-wire ■ High pressure resistance specifications guarantee zero point reproducibility and long-term stability of performance ■ Percentage accuracy of readings provides excellent results in low pressure ranges *For more details, please refer to the PDF document or feel free to contact us.

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The "1179C" is a versatile mass flow controller compatible with various applications. It has a full-scale range from 10 sccm to 20 sim, allowing for high-speed and highly reproducible flow control down to low flow rates of 0.2 sccm. Additionally, by connecting a compatible pressure transducer, it can also be used as a pressure control device. It can directly replace most common MFCs. The electrical connector features a D-sub connector with the same pin configuration, signals, and functions as industry standards, eliminating the need for changes to cables or connectors. It is compatible with MKS and other manufacturers' MFC power supplies and displays. 【Features】 ■ Supports demanding processes ■ Excellent zero stability due to patented sensor design ■ Accurate and highly reproducible flow measurement and control over a full-scale range of 10 sccm to 20 sim ■ Analog accuracy at full scale in percent ■ Reduced downtime with fast warm-up ■ Compatible with other MKS MFCs and power readouts *For more details, please refer to the PDF document or feel free to contact us.

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The "Baratron 600 Series" is a RoHS-compliant absolute capacitance manometer designed to provide accurate and highly reproducible pressure and vacuum measurements even in harsh process environments. It is utilized as the most stable low-pressure measurement pressure transducer. 【Features】 ■ Achieves a minimum of 2.66 Pa F.S. ■ Directly measures total pressure regardless of gas composition ■ Measures up to 1×10^-4 F.S. with percentage accuracy ■ A variety of lineups from temperature-controlled types up to 200°C to those with setpoint relays ■ Corrosion-resistant structure made entirely of Inconel or Incoloy nickel alloy *For more details, please refer to the PDF document or feel free to contact us.

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"MultiGas TM Purity" is an FTIR-based analyzer capable of detecting ppb-level impurities in high-purity bulk process gases. It excels in identifying impurities in bulk gases with high-resolution analysis. 【Features】 ■ Proven contribution to quality improvement in bulk gas manufacturing with gases such as NF3, NH3, and H2. ■ Configuration that accommodates corrosive high-purity gases: - Sample line and gas cell are of welded 316SS type. - Utilizes a heated optical path to reduce contaminants from moisture and the atmosphere. *For more details, please refer to the PDF document or feel free to contact us.

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"Paragon (R)" has achieved more suitable data transfer and control for next-generation nano process development and manufacturing, based on the characteristics of the MKS low magnetic field toroidal plasma source with a proven track record in mass production. It supports CVD and ALD/ALE process chamber cleaning, achieving high analytical efficiency (>98%) even under conditions of 8 slm NF gas flow and a maximum pressure of 10 Torr. 【Features】 ■ Maximum NF flow rate of 8 slm, compact design for reduced cleaning time ■ Unique plasma block design with PEO coating improves process performance and lifespan ■ RoHS compliant, CE, S2, F47 *For more details, please refer to the PDF document or feel free to contact us.

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The "DA03A" is a RoHS-compliant digital high-temperature type Baratron® capacitance manometer. By operating at high temperatures, it minimizes the accumulation of process by-products inside the sensor. This nearly eliminates output drift caused by by-product accumulation. It can be used at operating temperatures of 150°C or 160°C, making it suitable for the most demanding and harsh vacuum processes in semiconductor manufacturing, such as metal etching and insulating film CVD. 【Features】 ■ Operates at high temperatures of 150°C and 160°C ■ All Inconel capacitance sensor ■ Space-saving compact design ■ Stable performance regardless of gas type ■ EU RoHS compliant *For more details, please refer to the PDF document or feel free to contact us.

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This is an introduction to Japan MKS Inc., which develops, manufactures, and supplies equipment, components, and subsystems for the measurement, control, and analysis of gases used in various manufacturing processes, including semiconductor and FPD manufacturing, as well as the development, manufacturing, and supply of reactive gas generators and power supplies. *For more details, please refer to the PDF document or feel free to contact us.*

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■F.S. Range: 1.33×10<SUP>1</SUP> to 3.33×10<SUP>6</SUP> Pa ■Accuracy: 0.05 to 0.12% ■Significant Figures: 6 digits ■Temperature Control: 45°C

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This is an RGA device that distinguishes the quality of vacuum in a system (normal/abnormal). Until now, RGA management control, which had distance limitations using serial cables or LAN (Ethernet), can now be accessed from anywhere in the world where there is an internet connection, allowing control beyond distances. Not only does it improve ease of use, but it also opens up new possibilities for process monitoring and e-Diagnostics. 【Specifications】 ◇ Mass Range: 1-100 / 1-200 amu ◇ Resolution: ≦10% valley (between peaks of the same height within the mass range) 【Features】 ○ Low cost & compact at 1.9 kg (controller weight) ○ Can be used with easy installation and minimal maintenance. ○ Built-in 10Base-T Ethernet interface and embedded web server enable direct operation using internet connectivity. *For more details, please inquire through the request for materials.

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The latest model from MKS, which has a long track record in high-temperature controlled vacuum gauges, features a compact all-in-one design and energy efficiency.

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