Reduce zero point shift due to high-temperature operation, for CVD, Etch, and ALD!
The "DA03A" is a RoHS-compliant digital high-temperature type Baratron® capacitance manometer. By operating at high temperatures, it minimizes the accumulation of process by-products inside the sensor. This nearly eliminates output drift caused by by-product accumulation. It can be used at operating temperatures of 150°C or 160°C, making it suitable for the most demanding and harsh vacuum processes in semiconductor manufacturing, such as metal etching and insulating film CVD. 【Features】 ■ Operates at high temperatures of 150°C and 160°C ■ All Inconel capacitance sensor ■ Space-saving compact design ■ Stable performance regardless of gas type ■ EU RoHS compliant *For more details, please refer to the PDF document or feel free to contact us.
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【Specifications】 ■Internal capacity: 6.3cm3 ■Response time: 50msec ■Warm-up time: Less than 4 hours ■Operating temperature range: 15 to 50℃ ■Overpressure limit: 45psia *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Our company is a global leading company that provides cutting-edge manufacturing process technologies in growth industries, such as thin film applications for semiconductor devices, FPD, OLED, solar cells, data storage, and coatings, as well as industrial applications in medical devices, energy, environmental monitoring, and biopharmaceuticals. We offer worldwide support from service centers located around the world.
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