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  6. FTIR Analyzer "MultiGas TM Purity"

FTIR Analyzer "MultiGas TM Purity"

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last updated:Aug 04, 2023

日本エム・ケー・エス
日本エム・ケー・エス
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High-sensitivity analyzer for bulk process gas analysis based on FTIR!

"MultiGas TM Purity" is an FTIR-based analyzer capable of detecting ppb-level impurities in high-purity bulk process gases. It excels in identifying impurities in bulk gases with high-resolution analysis. 【Features】 ■ Proven contribution to quality improvement in bulk gas manufacturing with gases such as NF3, NH3, and H2. ■ Configuration that accommodates corrosive high-purity gases: - Sample line and gas cell are of welded 316SS type. - Utilizes a heated optical path to reduce contaminants from moisture and the atmosphere. *For more details, please refer to the PDF document or feel free to contact us.

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2018-07-13_13h38_27.png

FTIR Analyzer "MultiGas TM Purity"

2018-07-13_13h38_27.png
2018-07-13_13h38_27.png

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【Specifications】 ■Dimensions: 444.5W × 317.5H × 648D mm ■Weight: 57kg ■Required Power Supply: 120/240VAC, 6A ■Scan Time: 1 to 300 seconds *For more details, please refer to the PDF document or feel free to contact us.

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日本エム・ケー・エス

日本エム・ケー・エス

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Our company is a global leading company that provides cutting-edge manufacturing process technologies in growth industries, such as thin film applications for semiconductor devices, FPD, OLED, solar cells, data storage, and coatings, as well as industrial applications in medical devices, energy, environmental monitoring, and biopharmaceuticals. We offer worldwide support from service centers located around the world.

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