Remote Internet management realized, vacuum gas analysis management device.
This is an RGA device that distinguishes the quality of vacuum in a system (normal/abnormal). Until now, RGA management control, which had distance limitations using serial cables or LAN (Ethernet), can now be accessed from anywhere in the world where there is an internet connection, allowing control beyond distances. Not only does it improve ease of use, but it also opens up new possibilities for process monitoring and e-Diagnostics. 【Specifications】 ◇ Mass Range: 1-100 / 1-200 amu ◇ Resolution: ≦10% valley (between peaks of the same height within the mass range) 【Features】 ○ Low cost & compact at 1.9 kg (controller weight) ○ Can be used with easy installation and minimal maintenance. ○ Built-in 10Base-T Ethernet interface and embedded web server enable direct operation using internet connectivity. *For more details, please inquire through the request for materials.
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basic information
This is an RGA device that distinguishes the quality of vacuum in the apparatus (normal/abnormal). Until now, RGA management control, which had distance limitations using serial cables or LAN (Ethernet), can now be accessed from anywhere in the world where there is an internet connection, allowing control beyond distances. Not only does it improve ease of use, but it also opens up new possibilities for process monitoring and e-Diagnostics. 【Specifications】 ◇Mass Range: 1-100 / 1-200 amu ◇Resolution: ≦10% valley (between peaks of the same height within the mass range) 【Features】 ○Low cost & compact at 1.9 kg (controller weight) ○Easy installation and can be used with minimal maintenance. ○Equipped with a 10Base-T Ethernet interface and built-in web server, enabling direct operation using the internet environment. *For more details, please inquire through the request for materials.
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Applications/Examples of results
- Management of overseas factories and control of the headquarters factory during business trips - Vacuum gas management in the LCD, PV industry, and semiconductor pre-treatment processes - Management of vacuum chamber operations in the research laboratory - Troubleshooting outside of working hours, etc.
Company information
Our company is a global leading company that provides cutting-edge manufacturing process technologies in growth industries, such as thin film applications for semiconductor devices, FPD, OLED, solar cells, data storage, and coatings, as well as industrial applications in medical devices, energy, environmental monitoring, and biopharmaceuticals. We offer worldwide support from service centers located around the world.
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