Diaphragm vacuum gauge (Baratron vacuum gauge)

basic information

150℃/200℃ compatible! The Baratron vacuum gauge is ideal for biopharmaceutical manufacturing and semiconductor manufacturing processes. The Baratron 631B is MKS's latest compact model, having supplied high-temperature controlled vacuum gauges for over 10 years. By maintaining high temperatures within the sensor and preventing the deposition of process by-products on the sensor, it reduces drift and achieves accurate and long-term stable pressure measurements. The 631B, which allows for temperature control at 150℃ or 200℃, is suitable not only for semiconductor manufacturing processes under harsh conditions such as metal etching, nitride CVD, and ALD, but also for biopharmaceutical processes like freeze-drying and sterilization equipment that use steam to prevent bacterial growth. Features: ● Minimum full-scale range: 133×10E-2Pa ● Maximum full-scale range: 133×10E5Pa ● Accuracy: 0.50% of reading ● Operates on ±15VDC input power only, low power consumption (maximum 1.0A) ● Built-in relay function adjustable from external sources (optional)

Price information

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Delivery Time

Applications/Examples of results

- Applications as a vacuum gauge for semiconductor manufacturing processes under stringent conditions - Biopharmaceutical processes such as freeze-drying equipment and sterilization equipment that use steam to prevent bacterial growth