大村技研 List of Products and Services

The "Continuous Heat Treatment Furnace" from Omura Giken is a device that can be used for continuous heat treatment of electronic components at a uniform temperature. It is capable of handling heat treatment for all types of electronic components and is suitable for small lots of various types of electronic parts. With high-precision temperature control, it contributes to improved yield. 【Features】 ■ Continuous heat treatment of electronic components at a uniform temperature ■ Compatible with various types and small lots of electronic components ■ High-precision temperature control ■ Custom design and manufacturing available based on specifications *For more details, please refer to the PDF document or feel free to contact us.

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At Omura Giken, we offer services for drying tests and prototype manufacturing using vacuum drying ovens, as well as a vacuum drying outsourcing service. We also manufacture equipment that incorporates feedback from test results, with structural designs that minimize heater exposure as much as possible. 【Features】 ■ Contracted vacuum drying tests ■ Manufacturing of equipment based on feedback from test results *For more details, please refer to the PDF materials or feel free to contact us.

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Omura Giken's "Vacuum Drying System" is a device used for drying moisture and solvents in rechargeable batteries, lithium-ion batteries, and lithium-ion capacitor electrodes. By utilizing multiple units for drying, it achieves space-saving and reduces drying time. Additionally, high-precision temperature control contributes to improved yield. We respond to customer requests with full custom manufacturing. 【Features】 ■ Contributes to satisfaction with specifications through full custom manufacturing ■ Contributes to space-saving through multiple unit drying ■ High-precision temperature control ■ Energy savings through reduced drying time *For more details, please refer to the PDF materials or feel free to contact us.

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At Omura Giken, we provide high-temperature treatment furnaces using our unique high-temperature processing technology for production equipment and research and development. Key manufacturing equipment includes diffusion furnaces, epitaxial devices, CVD devices, etching devices, and controllers for semiconductor manufacturing installations. Additionally, we offer vertical electric furnaces suitable for small-diameter substrates, horizontal diffusion furnaces for solar cell manufacturing, and horizontal CVD devices from the LC6400 series. 【Features】 ■ High-temperature treatment furnaces for production equipment and research and development ■ Suitable for semiconductor manufacturing and solar cell production ■ Diverse lineup *For more details, please refer to the PDF materials or feel free to contact us.

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At Omura Giken, we design and manufacture film deposition devices and annealing equipment using lamp heating to meet our customers' needs. We offer a lineup that includes vertical LP-CVD devices, vertical annealing devices, PE-CVD devices, and MO-CVD devices. 【Features】 ■ Custom design and manufacturing to meet needs ■ Film deposition devices and lamp heating annealing equipment ■ Diverse lineup *For more details, please refer to the PDF materials or feel free to contact us.

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Omura Giken's "Photolithography Process Equipment" is a system that provides a series of processes in thin-film electronic component manufacturing with high precision and reliability. We offer production equipment for cleaning, coating, developing, stripping, etching, and equipment for research and development. The "Fully Automatic Spin Etching Device" extracts wafers one by one, sprays chemicals while rotating, and automatically processes everything from etching to drying. [Features] - Provides a series of processes for thin-film electronic component manufacturing - Compatible with various equipment - Fully automatic spin etching device is also available in the lineup *For more details, please refer to the PDF document or feel free to contact us.

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Omura Giken's "Burn-in System" is a system that applies temperature and electrical stress to semiconductor devices and electronic components, helping to identify early failure products. It is possible to manufacture systems with added functions tailored to the needs of device types, processing quantities, applied signals, etc., for screening mass-produced products as well as for reliability evaluation. You can choose from various types suited to usage conditions, such as space-saving types, high-heat device compatible types, and low-temperature test compatible types. 【Features】 ■ For identifying early failure products ■ From screening mass-produced products to reliability evaluation ■ Ability to select products with features tailored to usage conditions *For more details, please refer to the PDF materials or feel free to contact us.

• Other measuring instruments
• Other analytical equipment
• Analysis and prediction system

Since our founding, we have built a network of trust over the course of half a century, enabling us to handle processes such as wafer size reduction, cleaning, and plating. If you have any thoughts like, "Can you do this kind of processing...," please feel free to consult with us. For more details, please download our catalog or contact us.

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We provide fine pattern wafers using KrF steppers. Custom pattern layouts are available. Connection patterns and double patterning are also possible. For more details, please download the catalog or contact us.

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We primarily focus on 6-inch MEMS processing, but we can also accommodate partial patterning for 8-inch and 12-inch wafers. We select equipment based on the substrate size and pattern specifications. We can handle orders starting from just one piece. We support photolithography (aligner, KrF, EB), wet etching, milling, and RIE. We also accommodate substrates other than silicon, so please feel free to consult with us. For more details, please download the catalog or contact us.

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We mainly offer contract processing for PE-CVD film deposition, as well as film deposition using sputtering, ion plating, evaporation, and EB evaporation. We also have targets available for film deposition on large-diameter substrates, so please feel free to contact us. For more details, please download the catalog or contact us.

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We offer contract processing for film deposition, focusing on SiO2 and SiN from PE=CVD. We can sometimes accommodate requests for thick thermal oxide films and a small number of thermal oxide films with our stock items, so please feel free to contact us. For more details, please download the catalog or contact us.

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As part of our foundry services, we also sell wafers. We can accommodate wafers according to special specifications. [Examples] - As-sliced, as-lapped, etched wafers - Low-resistance, high-resistance wafers - Fabrication of dopant-specified wafers (B, P, AS, Sb) - Double-sided mirror wafers - Fabrication of notch wafers with a diameter of 6 inches or less - Fabrication of irregular and special-sized wafers (Max Φ450mm) - Fabrication of thin and thick wafers - Dicing, cutting, drilling, grooving, size reduction processing, etc. - Wafer regeneration - Cassette cleaning For more details, please download the catalog or contact us.

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We provide SOI wafers manufactured using a bonding method. We can also offer custom production according to specifications and e-SOI wafers with controlled edge shapes. We accommodate small lot sizes and can support patterning (such as PZT, Deep-RIE, etc.). Please first contact us with your main specifications. For small lots, we may be able to respond quickly using our stock. For new production, we can accommodate orders starting from 15 pieces, depending on the specifications. We can also provide SOI wafers (e-SOI wafers) with controlled edge shapes. For more details, please download the catalog or contact us.

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Omura Giken Co., Ltd. is a company where gas-related and semiconductor-related businesses are closely linked. Various production factories (semiconductors, LCDs, food products, machinery), research institutes, and other fields are our areas of expertise. Omura Giken's technology is adopted in many industries that require strict precision, meticulousness, and safety, including the semiconductor industry, LCDs, fuel cells, eco-related sectors, food factories, various manufacturing plants, pharmaceutical research institutes, and research organizations. We leverage our extensive experience and trusted network cultivated in the semiconductor field to provide contract processing tailored to our customers' specifications. Our contract processing services are utilized by many customers for equipment development and evaluation, various material development and evaluation, equipment parts, and customer prototypes and research and development. As part of our wafer foundry services, we offer: - SOI wafers - Silicon wafer sales - Film deposition processing (CVD) - Film deposition processing (PVD) - Patterning - Nano-patterning - Other processing services Please feel free to contact us anytime. For more details, please inquire or download our catalog.

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