Can accommodate processing of a small number of pieces. Substrates other than silicon wafers can be used.
We primarily focus on 6-inch MEMS processing, but we can also accommodate partial patterning for 8-inch and 12-inch wafers. We select equipment based on the substrate size and pattern specifications. We can handle orders starting from just one piece. We support photolithography (aligner, KrF, EB), wet etching, milling, and RIE. We also accommodate substrates other than silicon, so please feel free to consult with us. For more details, please download the catalog or contact us.
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【Processing Examples】 ○ Silicon Deep Etching ○ Bump Formation ○ Si Photo Etching ○ AL Photo Etching ○ Cr Photo Etching ○ ITO Photo Etching ○ Si Pillar Formation ○ CSP, WCSP ○ Quartz Photo Etching ○ Cu Photo Etching ○ Au Photo Etching ○ Lift-Off Processing ● For more details, please download the catalog or contact us.
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Company information
Omura Giken Co., Ltd. is a company engaged in machining, high-pressure/special gas piping, welding, assembly, design, and the regeneration and ancillary work of used semiconductor manufacturing equipment. Our refined technology is adopted in many industries that require precision, meticulousness, and safety, including the semiconductor industry, liquid crystal displays, fuel cells, eco-related fields, food factories, various manufacturing plants, pharmaceutical research institutes, and research organizations. Our motto is "Omura Giken when in trouble," and we strive to be more flexible, prompt, and advanced, always pursuing 100% customer satisfaction.