Electron beam lithography equipment, EUV exposure equipment, powder resist for nanoimprint lithography.
AQM's H-SiOx can be stored in powder form for a long time and is a negative-type resist that can be used after mixing with a solvent before use.
Compared to pre-mixed types that are already combined with a solvent, it does not thicken, allowing for consistent film thickness, and viscosity can be adjusted to create various film thicknesses.
Additionally, with a shelf life of one year, it is an economical resist with minimal waste. Recent tests have achieved a line width of 7nm.
【Features】
- Long-term storage possible (1 year)
- Consistent viscosity for use at any time... it does not thicken since it is mixed with a solvent before use.
- Wide range of film thicknesses can be created by adjusting viscosity
- 5nm film thickness, 7nm resolution
- Reduction in waste... available for purchase in small quantities.
- Comprehensive support system
- Excellent LER (Line Edge Roughness)
- Strong resistance to dry etching
For more details, please refer to the catalog or contact our representative, Kitano.