Electron beam lithography equipment, EUV exposure equipment, powder resist for nanoimprint lithography.
AQM's H-SiOx can be stored in powder form for a long time and is a negative-type resist that can be used after mixing with a solvent before use. Compared to pre-mixed types that are already combined with a solvent, it does not thicken, allowing for consistent film thickness, and viscosity can be adjusted to create various film thicknesses. Additionally, with a shelf life of one year, it is an economical resist with minimal waste. Recent tests have achieved a line width of 7nm. 【Features】 - Long-term storage possible (1 year) - Consistent viscosity for use at any time... it does not thicken since it is mixed with a solvent before use. - Wide range of film thicknesses can be created by adjusting viscosity - 5nm film thickness, 7nm resolution - Reduction in waste... available for purchase in small quantities. - Comprehensive support system - Excellent LER (Line Edge Roughness) - Strong resistance to dry etching For more details, please refer to the catalog or contact our representative, Kitano.
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basic information
【Features】 - Long-term storage possible (1 year) - Usable with the same clay at any time... does not thicken as it is mixed with solvent before use. - Capable of creating films with a wide range of thicknesses by adjusting the clay - 5nm film thickness, 7nm resolution - Reduction of waste... available for purchase in small quantities. - Comprehensive support system - Excellent LER (Line Edge Roughness) - Strong resistance to dry etching
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Applications/Examples of results
Electron beam lithography equipment, EUV exposure equipment, for nanoimprint lithography.
Company information
Optosirius is a technical trading company that imports and sells spectrometers, measuring instruments, and optical components. Our main product line features compact spectrometers from Ocean Optics, which boasts one of the largest market shares in the world. Additionally, we handle high-brightness LED products, compact Raman measuring instruments, multispectral sensors/multispectral cameras, compact color luminance meters capable of high-speed data acquisition, switches compatible with multimode optical fibers, materials such as quantum dots, and optical components like infrared detectors. A list of manufacturers we represent as authorized import agents, along with detailed information on each manufacturer's products, can be found on our company website.
