Analysis by EPMA can detect using PET and PETH spectroscopic crystals, allowing for peak separation of 17Cl and 47Ag!
EPMA has superior detection resolution compared to EDX. Even in cases where the detection positions of elements are close in EDX, making peak separation difficult, it may be possible to achieve peak separation with EPMA. This document introduces the peak separation of 47Ag and 17Cl. It includes cross-sectional observations of chip resistors, X-ray spectra of 47Ag, and mapping comparisons. [Contents] - Peak separation of 47Ag and 17Cl - X-ray spectrum of 47Ag - Mapping comparison *For more details, please refer to the PDF document or feel free to contact us.
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Aites was established in 1993, originating from the quality assurance department of the IBM Japan Yasu office. Based on the technical expertise cultivated through cutting-edge defect analysis and reliability assurance of electronic components at the IBM Japan Yasu office, we have provided various products and services that support the development and manufacturing of semiconductors, displays, organic EL, solar cells, and electronic components to customers both domestically and internationally.