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  6. Dust behavior analysis software 'DSMC-Neutrals'

Dust behavior analysis software 'DSMC-Neutrals'

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DSMC-Neutrals

last updated:Nov 14, 2022

ウェーブフロント 本社
ウェーブフロント 本社
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"Dust behavior affecting contamination" analysis supported by the rarefied fluid analysis software 'DSMC-Neutrals'.

Simulation Analysis of Dust Behavior Affecting Contamination Initially compatible with various simulations 【Features】 ■ By adopting unstructured meshes, it is possible to compute the exact shape of complex actual devices. ■ High parallel efficiency allows for quick computation results even for large-scale shapes. ■ Since a particle method is used, unlike fluid models, convergence solutions can always be obtained even with poor quality computational grids. ■ With comprehensive technical support, even those new to simulations or busy with experiments can reliably achieve results. ◆ Compatible with various cases ◆ - Simulation of rarefied gas flow in a vacuum chamber - Simulation of thin film generation in semiconductor manufacturing - Simulation of thin film generation in semiconductor manufacturing such as Chemical Vapor Deposition (CVD), Organic EL (OLED), and Molecular Beam Epitaxy (MBE) ◆ Outputs various computation results ◆ - Calculation of chemical reactions - Calculation of chemical reactions from Arrhenius-type reaction data - Calculation of dissociation, recombination, and molecular (atomic) exchange reactions - Multiple reaction equations can be set up on the GUI *We also offer contract analysis, so please feel free to contact us.

    Scientific Calculation and Simulation SoftwareOther SoftwareOther Hydrogen/Fuel Cells
thermophoresis_model.png

Dust behavior analysis software 'DSMC-Neutrals'

thermophoresis_model.png
thermophoresis_model.png
  • Related Link - http://www.wavefront.co.jp/CAE/dsmc-neutrals/

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**Features** - A simulation software for dilute fluid using the particle method, useful for experiments and equipment development involving vacuum chambers. - Capable of simulating film deposition that includes chemical reactions, such as CVD. - Adopts unstructured meshes, allowing for calculations that reflect the actual shape of the equipment. - High parallel efficiency enables quick computation results even for large-scale shapes. - Since it uses the particle method, unlike fluid models, it can achieve a convergent solution even with poor quality computational grids. - With comprehensive technical support, even those new to simulations or busy with experiments can reliably obtain results. - For other functions and details, please contact us.

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Applications/Examples of results

◆ Organic EL (OLED) Simulation * Uniformity of film deposition rate, optimization of shape, temperature dependence of organic material deposition distribution in organic EL simulation, etc. ◆ Molecular Beam Epitaxy (MBE) Simulation * Optimization of molecular beam cell shape, uniformity of deposition distribution, concentration distribution in molecular beam epitaxy simulation, etc. ◆ Showerhead-type CVD (Chemical Vapor Deposition) * Evaluation of deposition rate * Evaluation of film uniformity * Distribution of radicals affecting film growth in the gas phase * Concentration distribution on the substrate surface * Evaluation of gas flow rate and flow volume entering the chamber from the showerhead section ◆ Vacuum Pump Exhaust Simulation * Temperature and cross-sectional area dependence of conductance, effects of gas accumulation and outgassing, etc. ◆ Behavior of Macroparticles (Dust) * Effects of macroparticles within the chamber, etc. ◆ Hypersonic Rarefied Flow * Density and temperature distribution around objects, effects of chemical reactions, etc. ◆ Shock Waves ◆ Benard Convection ◆ Behavior of dust in the chamber * Effects of dust on the film that need to consider gravity.

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Handling CAE Solutions

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A rich lineup of "CAE solutions" available in various fields ■ Plasma Solutions - Low Temperature Plasma Analysis [VizGlow] Analyzes plasma under various conditions using a compressible fluid model. - Thermal Plasma Analysis [VizSpark] Analyzes heat and temperature rise associated with heat generated by arc plasma. - Particle Method Plasma Analysis [Particle-PLUS] Specializes in plasma analysis for semiconductor-related devices at low pressure. - 3D Rarefied Gas Analysis [DSMC-Neutrals] Supports calculations of complex shapes and analyzes gas flow simulations throughout the entire device. ■ Integrated Simulation for Material Development [Materials Studio] Supports various fields such as crystal growth, catalysts, fuel cells, lubricants, catalysts, and polymers. ■ Dedicated Thermal Fluid Analysis for Pumps and Valves [PumpLinx] Analyzes the transient characteristics of fluids in various volumetric pumps, compressors, and valves. ■ General Purpose Thermal Fluid Analysis Software [Simerics MP for SOLIDWORKS] CAD-integrated thermal fluid analysis that can be operated on SOLIDWORKS. *Please feel free to contact us for more details!

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Handling CAE Solutions

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A rich lineup of "CAE solutions" available in various fields ■ Plasma Solutions - Low-Temperature Plasma Analysis [VizGlow] Analyzes plasma under various conditions using a compressible fluid model. - Thermal Plasma Analysis [VizSpark] Analyzes heat generated by arc plasma and the resulting temperature rise. - Particle Method Plasma Analysis [Particle-PLUS] Specializes in plasma analysis for semiconductor-related devices at low pressure. - 3D Rarefied Gas Analysis [DSMC-Neutrals] Supports calculations for complex shapes and analyzes gas flow throughout the entire device. ■ Integrated Simulation for Material Development [Materials Studio] Supports various fields such as crystal growth, catalysts, fuel cells, lubricants, catalysts, and polymers. ■ Dedicated Thermal Fluid Analysis for Pumps and Valves [PumpLinx] Analyzes the transient characteristics of fluids in various volumetric pumps, compressors, and valves. ■ General-Purpose Thermal Fluid Analysis Software [Simerics MP for SOLIDWORKS] CAD-integrated thermal fluid analysis that can be operated on SOLIDWORKS. *Please feel free to contact us for more details!

Added to bookmarks

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Handling CAE Solutions

  • Product news

A rich lineup of "CAE solutions" available in various fields ■ Plasma Solutions - Low-temperature plasma analysis [VizGlow] Analyzes plasma under various conditions using a compressible fluid model. - Thermal plasma analysis [VizSpark] Analyzes heat generated by arc plasma and the resulting temperature rise. - Particle method plasma analysis [Particle-PLUS] Specializes in plasma analysis for semiconductor-related devices at low pressure. - 3D rarefied gas analysis [DSMC-Neutrals] Supports calculations of complex shapes and analyzes gas flow simulations throughout the entire device. ■ Integrated simulation for materials development [Materials Studio] Supports various fields such as crystal growth, catalysts, fuel cells, lubricants, catalysts, and polymers. ■ Dedicated thermal fluid analysis for pumps and valves [PumpLinx] Analyzes the transient characteristics of fluids in various volumetric pumps, compressors, and valves. ■ General-purpose thermal fluid analysis software [Simerics MP for SOLIDWORKS] CAD-integrated thermal fluid analysis that can be operated on SOLIDWORKS. *Please feel free to contact us for more details!

Added to bookmarks

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Handling CAE solutions

  • Company news

A rich lineup of "CAE solutions" available in various fields ■ Plasma Solutions - Low Temperature Plasma Analysis [VizGlow] Analyzes plasma under various conditions using a compressible fluid model. - Thermal Plasma Analysis [VizSpark] Analyzes heat and temperature rise associated with heat generated by arc plasma. - Particle Method Plasma Analysis [Particle-PLUS] Specializes in plasma analysis for semiconductor-related equipment at low pressure. - 3D Rarefied Gas Analysis [DSMC-Neutrals] Supports calculations of complex shapes and analyzes gas flow simulations throughout the entire device. ■ Integrated Simulation for Material Development [Materials Studio] Supports various fields such as crystal growth, catalysts, fuel cells, lubricants, catalysts, and polymers. ■ Dedicated Thermal Fluid Analysis for Pumps and Valves [PumpLinx] Analyzes the transient characteristics of fluids in various volumetric pumps, compressors, and valves. ■ General-purpose Thermal Fluid Analysis Software [Simerics MP for SOLIDWORKS] CAD-integrated thermal fluid analysis that can be operated on SOLIDWORKS. *Please feel free to contact us for more details!

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Our company develops and sells a "Maintenance Management System" for managing and operating various plants, factories, and other facilities and assets. Currently, this system is undergoing significant evolution into a system that incorporates IoT technologies, such as sensor information and input from tablet devices, as well as AI technologies like machine learning, featuring functions for failure prediction and automatic scheduling. Additionally, as part of the recent trend of digital transformation (DX), there is a growing movement to digitize and automate manufacturing processes and research and development sites in factories to improve operational efficiency. In line with this trend, our company provides a solution aimed at enhancing efficiency in research and development environments, which is the Laboratory Information Management System (LIMS). This software includes features such as workflow management, data tracking, data management, data analysis, and integration of electronic lab notebooks.

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