テルモセラ・ジャパン List of Products and Services

Continuous multilayer film, simultaneous film formation (2-6 element simultaneous film formation: RF, DC can be freely switched from HMI) High-power RF, DC power supplies, and pulse DC power supplies can be flexibly configured in multi-cathode arrangements using our unique 'Plasma Switching Relay' module, allowing for versatile applications. High-temperature substrate heating stage (double jacket water-cooled) options: -1) Max 600℃ (lamp heating) -2) Max 1000℃ (C/C composite) -3) Max 1000℃ (SIC coating) Reverse sputtering stage in load lock: -1) 300W, or -2) Soft-Etching (<30W) System main control: 'IntelliDep' control system Windows PC (or TP HMI) interface All operations are centrally managed from a single HMI screen.

• Air conditioning equipment
• Duct related equipment

Continuous multilayer film, simultaneous film formation (2-6 elements simultaneous film formation: RF, DC can be freely switched from HMI) High-power RF, DC power supplies, and pulse DC power supplies can be flexibly configured for multi-cathode using our unique 'Plasma Switching Relay' module, allowing for versatile applications. High-temperature substrate heating stage (double jacket water-cooled) options: -1) Max 600℃ (lamp heating) -2) Max 1000℃ (C/C composite) -3) Max 1000℃ (SiC coating) Reverse sputtering stage inside the load lock: -1) 300W, or -2) Soft-Etching (<30W) System main control: 'IntelliDep' control system Windows PC (or TP HMI) interface All operations are centrally managed from a single HMI screen.

• Air conditioning equipment
• Duct related equipment

ExTemp is an intrinsically safe explosion-proof radiation temperature sensor that can be used in hazardous material handling equipment and factories such as petrochemical plants, pharmaceutical factories, and chemical plants. (TIIS Type Certification Number: 21097)

• Other measuring instruments

**Overview** With a highly visible high-brightness touch panel display, parameters such as temperature range, emissivity, and sampling rate can be intuitively operated and set. Long-term data storage and management are possible with a microSD card. (*There is also an option for a converter without a display.) The compact sensor head measures φ18mm x 45mm, allowing for temperature measurements in tight spaces. It employs sensors and cables with excellent noise resistance, making it suitable for integration into moving devices such as robotic arms. The PM2.2 model uses a short wavelength of 2.2um, capable of measuring high temperatures (Max 2000℃) and glossy metallic surfaces. **Features** ◎ Wide range: -20 to 1000℃ (PM), 100 to 2000℃ (PM2.2) ◎ Excellent basic performance: Accuracy ±1%, Repeatability ±0.5%, 240msec fast response ◎ Measurement wavelength range: 8 to 14μm (PM), 2.0 to 2.2μm (PM2.2) ◎ Compact Φ18mm x 45mm

• Facility Management System

【Overview】 Install the standard accessory "Calexsoft," and then simply connect it to a Windows PC via a USB cable. You can easily set measurement parameters, conduct measurements, and analyze/export results in CSV format on your PC with a plug-and-play feel. USB output operates solely on USB bus power when connected to a PC, requiring no additional power supply. This expands its application range in various industrial fields and research laboratory experiments. 【Features】 ◎ USB data logging ◎ Wide range: -20°C to +1000°C ◎ Excellent basic performance: accuracy ±1%, reproducibility ±0.5%, 125 msec fast response ◎ Emissivity adjustment range: 0.2 to 1.0 ◎ Measurement wavelength range: 8 to 14 μm ◎ Compact size Φ18mm x 45mm

• Facility Management System

**Overview** The "PyroCouple" from UK-based Calex Electronics is a compact, lightweight, low-cost, and high-performance infrared temperature sensor unlike any other. It can non-contact measure the surface of objects that are "moving," "rotating," or "cannot be touched," allowing for fast and highly reproducible temperature control. **Features** ◎ Integrated amplifier and sensor ◎ 4-20mA output (standard), 0-50mV, thermocouple K, J, T output (optional) ◎ Accuracy: ±1% or ±1℃ (whichever is larger) ◎ Reproducibility: ±0.5% or ±0.5℃ (whichever is larger) ◎ Response time: 240msec ◎ Protection rating: IP65

• Other security systems

● You can use a smartphone or tablet to perform the settings. ● Download the dedicated app for free from Google Play (Android 4.1 to 5.1). ● Using Android's NFC communication, simply touch the sensor part to read and write data. ● Ultra-compact sensor (Φ31mm x t29mm) allows temperature measurement in narrow spaces. ● Fast response time of 125 msec, high accuracy of ±1.5%. ● Voltage output (0-5V or 0-10V), or K thermocouple output.

• Other measuring instruments

【Overview】 Connect to a Windows PC using the standard accessory "CalexConfig" and the included USB cable (1.8m), allowing for the configuration of sensor measurement parameters, analysis of measurement results, and CSV output on the PC. 1) 4-20mA output 2) USB output (operates on USB bus power) 3) Simultaneous use of 4-20mA/USB output These three usage methods are available. 【Features】 ◎ Simultaneous use of USB data logging and 4-20mA analog output ◎ Excellent basic performance: accuracy ±1%, reproducibility ±0.5%, 200msec fast response ◉ PUA2: Covers short wavelengths from 2.0 to 2.4μm, capable of measuring metal surfaces ◉ PUA5: Suitable for measuring glass surfaces at a wavelength of 5μm ◉ PUA8: General-purpose, applicable to a wide range of materials such as paper, wood, plastic, and textiles at a wavelength of 8-14μm

• Other security systems