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  3. クリエイティブテクノロジー
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クリエイティブテクノロジー

EstablishmentJuly 1985
capital3000Ten thousand
number of employees155
addressKanagawa/Takatsu-ku, Kawasaki-shi/1-11-33 Kamizaku, Yawata City
phone044-853-1757
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last updated:May 07, 2024
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クリエイティブテクノロジー List of Products and Services

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Eraser Disk

Inline cleaning of particles on the stage - wafer-type stage cleaner

In semiconductor manufacturing equipment, the presence of particles on pin chucks or electrostatic chucks, which serve as processing stages, can lead to process errors or equipment stoppages. Generally, particle removal is performed using inline cleaning (dummy runs) with dummy wafers, but particles that cannot be removed even during dummy runs require the equipment to be stopped for manual cleaning. However, it is a reality that this process takes a significant amount of time until the equipment is restored. To address this situation, Creative Technology has developed the wafer-type stage cleaner "eRaser Disk" as an inline stage cleaning tool for semiconductor manufacturing equipment. By coating a special resin on silicon wafers, it enhances particle removal performance, contributing to the reduction of dummy run time and the frequency of equipment stoppages.

  • cleaning

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Electrostatic Adsorption Display Board 'ESCLIP'

Power-saving & lightweight slim design! Introducing an evolved bulletin board utilizing our proprietary technology "electrostatic chuck."

"ESCLIP" is a static electricity adhesive display board that allows you to freely "stick" and "remove" items, simply attaching them with ease. If you have a paper you want to stick, just place it on the board. It adheres tightly using static electricity and can be reapplied multiple times. You won't have to worry about searching for lost magnets or dealing with the marks left by glue, tape, or pushpins. Aside from when you are sticking and removing items, it requires almost no power, and its lightweight and slim design makes it easy to set up anywhere. 【Features】 ■ No adhesive tools required ■ Does not damage important papers ■ Can be reapplied multiple times ■ Energy-efficient design for long-lasting use *For more details, please refer to the PDF document or feel free to contact us.

  • Other office supplies
  • Other store equipment and supplies
  • Other commercial buildings and service facilities

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Mobile Shoe Deodorizer "DEODORANT ONE"

Powerfully eliminates bacteria and odors! Fits various shoes with its flexible material.

We would like to introduce our mobile shoe deodorizer, "DEODORANT ONE." Our self-developed radicals (reactive species) generated near the surface effectively eliminate odor-causing bacteria. Additionally, the reactive species such as ozone produced by the radical sheet decompose unpleasant odors, effectively reducing the smell inside the shoes. Using it is simple: just insert it into the toe area of the shoe and press the switch. The built-in timer will automatically turn off the power once the sterilization is complete. 【Features】 ■ Our uniquely developed mobile radical sheet decomposes the source of odors, providing lasting deodorization effects. ■ Functional design and flexible materials fit various types of shoes. ■ Easy operation anytime, anywhere, with mode switching to suit different situations. ■ Available in white and blue. *For more details, please refer to the PDF document or feel free to contact us.

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Portable aroma air purifier "OiSHi"

Compact and lightweight design, battery-operated for easy portability! Custom designs can also be created.

"OiSHi" is a handheld air purifier that is among the lightest in the world. It blocks viruses with a high-performance filter developed in-house and negative ion power. Its compact, lightweight design and battery operation make it convenient to carry. The lineup includes a variety of colors such as "White," "Citrus," "Lavender," and "Blossom," and custom corporate colors and original designs can also be created. 【Features】 ■ Removes viruses and other particles from the air using our proprietary three-layer electrostatic dust-collecting high-performance filter ■ Excellent effectiveness even in a handheld size ■ Compact and lightweight design ■ Uses 100% natural essential oils for aroma *For more details, please refer to the PDF materials or feel free to contact us.

  • Air conditioning equipment

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Creative Technology Inc. Company Profile

Developing technologies for adhesion, control, and monitoring! Comprehensive support from design to manufacturing.

Creative Technology is a company that creates the future with "adhesive technology." As a manufacturer of components for semiconductor manufacturing equipment, we provide comprehensive support from design to manufacturing, including electrostatic chucks, heaters, and wafer stages. Some of our technologies are applied not only in the semiconductor industry but also in the transportation of glass and films, gaining attention in other industries such as the FPD sector. Please feel free to request our technology, which has various possibilities. 【Main Business Activities】 ■ Development, manufacturing, and sales of electrostatic chucks and related technologies ■ Development, manufacturing, and sales of other suction transport equipment ■ Development, manufacturing, and sales of power supplies and sensors for electrostatic chucks *For more details, please refer to the PDF document or feel free to contact us.

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Electrostatic chuck suction monitoring unit

By connecting between the electrostatic chuck and the control power supply, it is possible to continuously monitor the state of the electrostatic chuck and the object.

The "Adsorption Monitor Unit" from Creative Technology is a tool that allows for constant monitoring of the adsorption state between an electrostatic chuck and the target object by detecting capacitance. Without modifying the electrostatic chuck or power supply, it can be connected between the electrostatic chuck and the power supply, enabling the addition of sensor functionality to the electrostatic chuck. 【Features】 ■ Constant monitoring of the adsorption state of the target object ■ Detection of unexpected malfunctions ■ Easy installation *For more details, please refer to the PDF document or feel free to contact us.

  • Other analytical equipment

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[Demo unit available for loan] Grip and anti-slip pad (IonPad)

It is a gripping and anti-slip pad that enables high-speed and high-precision transport.

IonPad is a gripping and anti-slip pad that features excellent anti-slip performance, enabling high-speed transport and high-precision handling. It comes in two types: an adhesive type suitable for applications such as bonding glass and flat panel displays, and a non-adhesive type designed for high-speed transport anti-slip use. 【Features】 ■ Excels at gripping flat workpieces such as silicon wafers and glass. ■ Usable in both atmospheric and vacuum conditions. ■ Easy to maintain and can be reused multiple times. *For more details, please refer to the PDF document or feel free to contact us.

  • Picking robots (shelf transport robots, arm picking robots)
  • Automatic transport robot
  • Vertical Conveyor System

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[Demo unit available for loan] Dedicated power supply for electrostatic chucks

This is a dedicated power supply for an electrostatic chuck that can output high DC voltage with both positive and negative polarities.

At Creative Technology Co., Ltd., it is possible to introduce electrostatic chucks and make comprehensive proposals and purchases for dedicated power supplies and peripheral devices. Our "Dedicated Power Supply for Electrostatic Chucks" has been developed to allow for more comfortable and safe use of electrostatic chucks, with the option to select specifications according to the application. In the event of a chuck system malfunction, a safety feature is included that automatically turns off the power supply, preventing accidents before they occur. Additionally, it is designed to reduce residual charge when the power is off and maintain stable gripping force through the de-chucking assist function and polarity switching function. 【Features】 ■ Specification selection according to application ■ Automatic power-off function during abnormalities ■ Reduction of residual charge ■ Stable gripping force through polarity switching *For more details, please refer to the PDF document or feel free to contact us via our website. Website: https://creative-technology.co.jp/products/chuck/

  • DC Power Supply

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[Demo unit available for loan] Multi-material electrostatic chuck

You can use it for transporting materials like leather and sponge, as well as for folding fabric during product sewing!

The "Multi-Material Electrostatic Chuck" can adsorb and hold various objects, including textile materials. It can adsorb fabrics that cannot be held by vacuum, as well as cotton and other fabrics that are less prone to static electricity. Additionally, because it has full surface adhesion, it is less likely to cause wrinkles when adsorbing fabric. 【Features】 ■ Adsorbs and holds various objects, including textile materials ■ Adsorbs fabrics that cannot be held by vacuum ■ Adsorbs fabrics like cotton that are less prone to static electricity ■ Less likely to cause wrinkles when adsorbing fabric due to full surface adhesion *For more details, please refer to the PDF document or feel free to contact us.

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[Demo unit available for loan] Polyimide electrostatic chuck

Contributes to maintaining cleanliness! Used in semiconductor manufacturing equipment and display manufacturing equipment, etc.

The "Polyimide Electrostatic Chuck" generates fewer particles due to wear and contributes to maintaining cleanliness since it has no moving parts. It can grip thin or easily deformable products without applying stress, and when used for transporting wafers or glass, it can operate with less than 1W of power. Additionally, the gripping force is effective not only in the atmosphere but also in a vacuum. It is also adopted in equipment that combines atmospheric and vacuum processes. 【Features】 ■ Clean device ■ Low damage ■ Usable under vacuum ■ Low power consumption *For more details, please refer to the PDF document or feel free to contact us.

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Particle Collector

Efficiently captures small particles that cannot be removed by a vacuum cleaner.

Our "Particle Collector" is a tool that utilizes the mechanism of electrostatic chucking to attract dust and particles in the environment. Equipped with a compact ionizer, it demonstrates high dust collection efficiency and can be easily installed in available wall spaces due to its slim and lightweight design. Additionally, since it does not use a fan motor or similar components, it operates silently, making it safe to use in quiet environments. 【Features】 ■ Low power consumption, environmentally friendly ■ Equipped with a compact ionizer ■ High dust collection efficiency ■ Easy installation with a slim and lightweight design ■ Silent operation *For more details, please refer to the PDF document or feel free to contact us.

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Customized electrostatic chuck

It is possible to propose suitable electrostatic chucks based on the object to be held, its application, and the environment.

Our company develops, manufactures, and sells electrostatic chucks made from various materials to meet our customers' requirements as a comprehensive electrostatic chuck manufacturer. We understand the environment in which our products will be used and the functions required, and through our development and design technology, we propose optimal product specifications. Additionally, we provide high-performance and high-functionality products utilizing advanced manufacturing technology. 【Examples of Optional Features】 ■ Built-in Heater - By integrating stage substrate manufacturing technology with thin heater manufacturing technology, high-precision temperature control is possible. ■ High-Temperature Compatibility - By using ALN ceramic as the material for the electrostatic chuck, it can be used in high-temperature environments up to 500°C. ■ Abnormal Discharge Countermeasures - Our expertise allows us to implement countermeasures against abnormal discharges that tend to occur around gas holes. *For more details, please refer to the PDF document or feel free to contact us.

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[Free Adhesion Test in Progress] Robot Transport Using Electrostatic Chuck

Our company's electrostatic chucks are compatible with collaborative robots and high-speed transport, supporting factory automation and labor reduction.

Our company's electrostatic chucks are increasingly being chosen as gripping and transport tools in the recent global trend towards automation and labor-saving, and they are compatible with a wide range of applications, including not only standard robots but also collaborative robots and high-speed transport. At Creative Technology, we can provide custom-designed electrostatic chucks tailored to our robots as well as to our customers' robots. Additionally, we can enable power ON/OFF through external signal input using dedicated power supplies, as well as set the applied voltage.

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