By connecting between the electrostatic chuck and the control power supply, it is possible to continuously monitor the state of the electrostatic chuck and the object.
The "Adsorption Monitor Unit" from Creative Technology is a tool that allows for constant monitoring of the adsorption state between an electrostatic chuck and the target object by detecting capacitance. Without modifying the electrostatic chuck or power supply, it can be connected between the electrostatic chuck and the power supply, enabling the addition of sensor functionality to the electrostatic chuck. 【Features】 ■ Constant monitoring of the adsorption state of the target object ■ Detection of unexpected malfunctions ■ Easy installation *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Recommended Cases for Adsorption Monitor Unit】 ■ When you want to continuously monitor the adsorption state of the electrostatic chuck ■ When you want to equip the electrostatic chuck with sensor functionality *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Application Examples】 ■ Continuous monitoring of electrostatic chucks ■ Detection of unexpected malfunctions ■ Easy communication with production equipment *For more details, please refer to the PDF document or feel free to contact us.
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Company information
In 1985, Creative Technology started with the development of processing technology for fine ceramics, a brittle material. In the 1990s, based on that processing technology, we successfully developed electrostatic chucks for semiconductor manufacturing equipment. Furthermore, in the early 2000s, we established a regeneration business for electrostatic chucks based on the development and manufacturing technology we had cultivated, building connections with customers around the world. Now, we are evolving the technology used in the semiconductor industry into various forms and working on the development of high-value-added electrostatic adhesion application products. Creative Technology contributes to labor-saving and IoT solutions in various fields with our technology that connects objects. If you can provide samples, we also conduct adhesion tests at our company. Please feel free to consult with us.