Inline cleaning of particles on the stage - wafer-type stage cleaner
In semiconductor manufacturing equipment, the presence of particles on pin chucks or electrostatic chucks, which serve as processing stages, can lead to process errors or equipment stoppages. Generally, particle removal is performed using inline cleaning (dummy runs) with dummy wafers, but particles that cannot be removed even during dummy runs require the equipment to be stopped for manual cleaning. However, it is a reality that this process takes a significant amount of time until the equipment is restored. To address this situation, Creative Technology has developed the wafer-type stage cleaner "eRaser Disk" as an inline stage cleaning tool for semiconductor manufacturing equipment. By coating a special resin on silicon wafers, it enhances particle removal performance, contributing to the reduction of dummy run time and the frequency of equipment stoppages.
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basic information
Main Features of the Product ■ Made from materials proven in vacuum processes The wafer-type stage cleaner "eRaser Disk" is composed entirely of materials that have been proven in vacuum processes. ■ Compatible with various stages It can be used with various stages such as pin chucks and electrostatic chucks installed in semiconductor manufacturing equipment. ■ Reusable The special resin-coated surface does not use adhesives. It can be reused repeatedly simply by wiping off the adhered particles. ■ Capable of capturing dust near the edges The use of a flexible special resin coating allows it to make contact not only with the flat part of the stage but also with the edges, capturing particles. ■ Custom design options available In addition to standard designs for 4 to 12-inch wafers, custom designs are also available. We can accommodate notches and orientation flats of the wafers you provide. Please feel free to consult us via the inquiry form.
Price information
Prices may vary depending on quantity and size, so please contact us for details.
Price range
P3
Delivery Time
Applications/Examples of results
It can be used for various stages such as pin chucks and electrostatic chucks installed in semiconductor manufacturing equipment. We accommodate not only standard 4 to 12-inch wafers but also custom designs. We can also accommodate notches and orientation flats on the supplied wafers. Please feel free to consult us through the inquiry form.
Company information
In 1985, Creative Technology started with the development of processing technology for fine ceramics, a brittle material. In the 1990s, based on that processing technology, we successfully developed electrostatic chucks for semiconductor manufacturing equipment. Furthermore, in the early 2000s, we established a regeneration business for electrostatic chucks based on the development and manufacturing technology we had cultivated, building connections with customers around the world. Now, we are evolving the technology used in the semiconductor industry into various forms and working on the development of high-value-added electrostatic adhesion application products. Creative Technology contributes to labor-saving and IoT solutions in various fields with our technology that connects objects. If you can provide samples, we also conduct adhesion tests at our company. Please feel free to consult with us.