[Demo unit available for loan] Dedicated power supply for electrostatic chucks
CTPS-3KV2AF and others
This is a dedicated power supply for an electrostatic chuck that can output high DC voltage with both positive and negative polarities.
At Creative Technology Co., Ltd., it is possible to introduce electrostatic chucks and make comprehensive proposals and purchases for dedicated power supplies and peripheral devices. Our "Dedicated Power Supply for Electrostatic Chucks" has been developed to allow for more comfortable and safe use of electrostatic chucks, with the option to select specifications according to the application. In the event of a chuck system malfunction, a safety feature is included that automatically turns off the power supply, preventing accidents before they occur. Additionally, it is designed to reduce residual charge when the power is off and maintain stable gripping force through the de-chucking assist function and polarity switching function. 【Features】 ■ Specification selection according to application ■ Automatic power-off function during abnormalities ■ Reduction of residual charge ■ Stable gripping force through polarity switching *For more details, please refer to the PDF document or feel free to contact us via our website. Website: https://creative-technology.co.jp/products/chuck/
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basic information
【Recommended Cases for Dedicated Power Supply for Electrostatic Chucks】 ■ When using an electrostatic chuck for the first time ■ If you are experiencing issues with residual charge ■ If you want to use an electrostatic chuck with stable gripping force *For more details, please refer to the PDF document or feel free to contact us.
Price range
P4
Delivery Time
Applications/Examples of results
【Application Examples】 ■ When introducing an electrostatic chuck ■ Improvement of de-chucking properties ■ Stability of gripping force *For more details, please refer to the PDF document or feel free to contact us.
Line up（2）
| Model number | overview |
|---|---|
| CTPS-3KV2AF | This is a dedicated power supply for electrostatic chucks compatible with 3Kv. |
| CTPS-2KV2AS | This is a dedicated power supply for electrostatic chucks compatible with 2Kv. |
catalog（2）
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Company information
In 1985, Creative Technology started with the development of processing technology for fine ceramics, a brittle material. In the 1990s, based on that processing technology, we successfully developed electrostatic chucks for semiconductor manufacturing equipment. Furthermore, in the early 2000s, we established a regeneration business for electrostatic chucks based on the development and manufacturing technology we had cultivated, building connections with customers around the world. Now, we are evolving the technology used in the semiconductor industry into various forms and working on the development of high-value-added electrostatic adhesion application products. Creative Technology contributes to labor-saving and IoT solutions in various fields with our technology that connects objects. If you can provide samples, we also conduct adhesion tests at our company. Please feel free to consult with us.
