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GasPro PTFE Gas Filter TEM-100 Series

GasPro PTFE Gas Filter TEM-100 Series

High-performance inline gas filter for semiconductor process gases and CDA of all grades, with a filtration precision of 0.003 microns.

GasPro filters are specially designed for filter applications of semiconductor process gases and CDA (Clean Dry Air) of all grades. They feature an all-welded structure that achieves a filtration precision of 0.003 microns even in high flow rate situations with limited space. The filters consist of a cartridge supported by a PTFE membrane and polypropylene, and an electropolished welded housing made of SUS316L. To ensure cleanliness, they are purged with filtered nitrogen before shipment. Various connection types are available for easy installation.

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GasPro PTFE Gas Filter TEM-200 Series

GasPro PTFE Gas Filter TEM-200 Series

High-performance inline gas filter for semiconductor process gases and CDA of all grades, with a filtration precision of 0.003 microns.

The GasPro filter is specially designed for filter applications of semiconductor process gases and CDA (Clean Dry Air) of all grades. It features an all-welded structure that achieves a filtration precision of 0.003 microns, even in situations where high flow rates are required and space is limited. It consists of a cartridge supported by a PTFE membrane and polypropylene, and an electropolished welded housing made of SUS316L. To ensure cleanliness, it is purged with filtered nitrogen before shipment. Various connection types are available for easy installation.

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GasPro PTFE Gas Filter TEM-300 Series

GasPro PTFE Gas Filter TEM-300 Series

High-performance inline gas filter for semiconductor process gases and CDA of all grades, with a filtration accuracy of 0.003 microns.

The GasPro filter is specially designed for filter applications of semiconductor process gases and CDA (Clean Dry Air) of all grades. It features an all-welded structure that achieves a filtration precision of 0.003 microns, even in situations where high flow rates are required and space is limited. It consists of a cartridge supported by a PTFE membrane and polypropylene, and an electropolished welded housing made of SUS316L. To ensure cleanliness, it is purged with filtered nitrogen before shipment. Various connection types are available for easy installation.

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GasPro PTFE Gas Filter TEM-500 Series

GasPro PTFE Gas Filter TEM-500 Series

High-performance inline gas filter for semiconductor process gases and CDA of all grades, with a filtration precision of 0.003 microns.

The GasPro filter is specially designed for filter applications of semiconductor process gases and CDA (Clean Dry Air) of all grades. It features an all-welded structure that achieves a filtration precision of 0.003 microns, even in situations where high flow rates are required and space is limited. It consists of a cartridge supported by a PTFE membrane and polypropylene, and an electropolished welded housing made of SUS316L. To ensure cleanliness, it is purged with filtered nitrogen before shipment. Various connection types are available for easy installation.

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GasPro PTFE Gas Filter TEM-800 Series

GasPro PTFE Gas Filter TEM-800 Series

High-performance inline gas filter for semiconductor process gases and CDA of all grades, with a filtration accuracy of 0.003 microns.

GasPro filters are specially designed for filter applications of semiconductor process gases and CDA (Clean Dry Air) of all grades. They feature an all-welded structure that achieves a filtration precision of 0.003 microns even in high flow rate situations with limited space. The filters consist of cartridges supported by a PTFE membrane and polypropylene, and an electropolished welded housing made of SUS316L. To ensure cleanliness, they are purged with filtered nitrogen before shipment. Various connection types are available for easy installation.

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GasPro High-Temperature Gas Filter TEM-700 Series

GasPro High-Temperature Gas Filter TEM-700 Series

High-performance membrane gas filter compatible with a maximum operating temperature of 400℃.

The GasProTEM-700 series is specially designed for reactive gases and halogenated microelectronics gases. It features an all-welded structure with a filter material of 0.01 microns. It is ideal for cases requiring high flow rates and low delta P, as well as for areas with limited space. The main body consists of a welded housing made of fiberglass and electropolished SUS316L, offering filtration performance that is 10 to 20 times higher than similar-sized membrane filters. To ensure cleanliness, it is purged with filtered nitrogen before shipment. The TEM-700 is intended for high-temperature applications (Max. 400°C) and is available in various connection types for easy installation.

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GasPro All- Fluoropolymer Gas Filter TEM-1300

GasPro All- Fluoropolymer Gas Filter TEM-1300

This is a high-performance inline gas filter for semiconductor gas filtration, with a filtration precision of 0.003 microns.

GasPro filters are specially designed for semiconductor gas filtration. They feature an all-welded structure that achieves a filtration precision of 0.003 microns, even in situations where high flow rates are required and space is limited. The media material is PTFE, and the welded housing is made of electropolished SUS316L. To ensure cleanliness, they are purged with filtered nitrogen before shipping. Various connection types are available for easy installation.

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GasPro All- Fluoropolymer Gas Filter TEM-1400

GasPro All- Fluoropolymer Gas Filter TEM-1400

This is a high-performance inline gas filter for semiconductor gas filters, with a filtration precision of 0.003 microns.

The GasPro filter is specially designed for semiconductor gas filtration. It features an all-welded structure that achieves a filtration precision of 0.003 microns, even in situations where high flow rates are required and space is limited. The media material is PTFE, and the welded housing is made of electropolished SUS316L. To ensure cleanliness, it is purged with filtered nitrogen before shipment. Various connection types are available for easy installation.

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GasPro All-Fluoropolymer Gas Filter TEM-1500

GasPro All-Fluoropolymer Gas Filter TEM-1500

This is a high-performance inline gas filter for semiconductor gas filters, with a filtration precision of 0.003 microns.

The GasPro filter is specially designed for semiconductor gas filtration. It features an all-welded structure that achieves a filtration precision of 0.003 microns, even in situations where high flow rates are required and space is limited. The media material is PTFE, and the welded housing is made of electropolished SUS316L. To ensure cleanliness, it is purged with filtered nitrogen before shipment. Various connection types are available for easy installation.

  • Automatic Control Equipment

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GasPro All- Fluoropolymer Gas Filter TEM-1900

GasPro All- Fluoropolymer Gas Filter TEM-1900

This is a high-performance inline gas filter for semiconductor gas filters, with a filtration accuracy of 0.003 microns.

The GasPro filter is specially designed for semiconductor gas filtration. It features an all-welded structure that achieves a filtration precision of 0.003 microns, even in situations where high flow rates are required and space is limited. The media material is PTFE, and the welded housing is made of electropolished SUS316L. To ensure cleanliness, it is purged with filtered nitrogen before shipment. Various connection types are available for easy installation.

  • Automatic Control Equipment

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GasPro PTFE Gas Filter TEM-400 Series

GasPro PTFE Gas Filter TEM-400 Series

High-performance inline gas filter for semiconductor process gases and CDA of all grades, with a filtration accuracy of 0.003 microns.

GasPro filters are specially designed for filter applications of semiconductor process gases and CDA (Clean Dry Air) of all grades. They feature an all-welded structure that achieves a filtration precision of 0.003 microns, even in high flow rate situations with limited space. The filters consist of cartridges supported by PTFE membranes and polypropylene, and a welded housing made of electropolished SUS316L. To ensure cleanliness, they are purged with filtered nitrogen before shipment. Various connection types are available for easy installation.

  • Automatic Control Equipment

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GasPro All- Fluoropolymer Gas Filter TEM-1100

GasPro All- Fluoropolymer Gas Filter TEM-1100

This is a high-performance inline gas filter for semiconductor gas filters, with a filtration accuracy of 0.003 microns.

The GasPro filter is specially designed for semiconductor gas filtration. It features an all-welded structure that achieves a filtration precision of 0.003 microns, even in situations where high flow rates are required and space is limited. The media material is PTFE, and the welded housing is made of electropolished SUS316L. To ensure cleanliness, it is purged with filtered nitrogen before shipment. Various connection types are available for easy installation.

  • Automatic Control Equipment

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GasPro All- fluoropolymer Gas Filter TEM-1200

GasPro All- fluoropolymer Gas Filter TEM-1200

This is a high-performance inline gas filter for semiconductor gas filters, with a filtration accuracy of 0.003 microns.

The GasPro filter is specially designed for semiconductor gas filtration. It features an all-welded structure that achieves a filtration precision of 0.003 microns, even in situations where high flow rates are required and space is limited. The media material is PTFE, and the welded housing is made of electropolished SUS316L. To ensure cleanliness, it is purged with filtered nitrogen before shipping. Various connection types are available for easy installation.

  • Automatic Control Equipment

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GasPro All- Fluoropolymer Gas Filter TEM-1800

GasPro All- Fluoropolymer Gas Filter TEM-1800

This is a high-performance inline gas filter for semiconductor gas filters, with a filtration precision of 0.003 microns.

The GasPro filter is specially designed for semiconductor gas filtration. It features an all-welded structure that achieves a filtration accuracy of 0.003 microns, even in situations where high flow rates are required and space is limited. The media material is PTFE, and the welded housing is made of electropolished SUS316L. To ensure cleanliness, it is purged with filtered nitrogen before shipment. Various connection types are available for easy installation.

  • Automatic Control Equipment

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GasPro TEM High-Performance Gas Filter Selection Guide

GasPro TEM High-Performance Gas Filter Selection Guide

[Selection Guide Available] Easy selection in 4 steps! You can choose the model that suits your situation from various gas filters!

Sayama Trading handles a variety of gas filters from Porvair. Please refer to steps 1-4 of the TEM high-performance gas filter selection guide and specify the series name starting with TEM and the fittings. <Selection Steps> - Step 1: Gas temperature - Step 2: Type of gas - Step 3: Gas flow rate - Step 4: Size and shape of fittings → Selecting the appropriate gas filter for your situation is completed in just 4 easy steps! *For more details, please download the PDF or contact us.

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