High-performance membrane gas filter compatible with a maximum operating temperature of 400℃.
The GasProTEM-700 series is specially designed for reactive gases and halogenated microelectronics gases. It features an all-welded structure with a filter material of 0.01 microns. It is ideal for cases requiring high flow rates and low delta P, as well as for areas with limited space. The main body consists of a welded housing made of fiberglass and electropolished SUS316L, offering filtration performance that is 10 to 20 times higher than similar-sized membrane filters. To ensure cleanliness, it is purged with filtered nitrogen before shipment. The TEM-700 is intended for high-temperature applications (Max. 400°C) and is available in various connection types for easy installation.
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basic information
[0.01 Micron Filter] Maximum filtration accuracy of 66.6666% (at 0.01 micron) [Maximum Operating Temperature] 400℃ [Maximum Operating Pressure] 1.72MPa [Glass Microfiber] 100% glass microfiber (supported by SUS316L mesh) [Clean Room Manufacturing] Manufactured in a clean room, handling work is particle-free, chemical-free, and organic substance-free [100% Helium Leak Test] <1×10 -9 atm cc/sec ◇◇◇ For more details, please refer to the product catalog ◇◇◇
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For reactive gases and halogenated microelectronics gases.
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Company information
Air Water Mechatronics Co., Ltd. ST Division handles excellent measurement/control equipment focused on the most important themes of pressure and flow in the field of measurement and control in the industrial sector. In pressure measurement, as the Japanese distributor for Setra Systems, we have supplied numerous pressure sensors domestically for many years. Setra's pressure sensors are characterized by high precision and sensitivity, and are used in many advanced technologies, including semiconductor manufacturing equipment. Additionally, to accommodate various industrial pressure measurement scenarios, we also handle products from companies such as BD and Honeywell. We manufacture digital pressure gauges that incorporate or externally attach these pressure sensors. Within our company, various pressure standards with traceability to national standards are installed in a strictly air-conditioned calibration inspection room, allowing us to conduct inspections and recalibrations in-house. Regarding flow measurement, we offer unique and high-value-added products for both liquid and gas (mass flow). For liquids, we primarily provide small, cost-effective, and highly accurate turbine flow meters, as well as Coriolis flow meters. We respond to diverse needs with disposable sensors for pharmaceutical and medical manufacturing, as well as certified sensors for food and beverage applications.