High-performance inline gas filter for semiconductor process gases and CDA of all grades, with a filtration accuracy of 0.003 microns.
GasPro filters are specially designed for filter applications of semiconductor process gases and CDA (Clean Dry Air) of all grades. They feature an all-welded structure that achieves a filtration precision of 0.003 microns, even in high flow rate situations with limited space. The filters consist of cartridges supported by PTFE membranes and polypropylene, and a welded housing made of electropolished SUS316L. To ensure cleanliness, they are purged with filtered nitrogen before shipment. Various connection types are available for easy installation.
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basic information
[Flow Rate] 0 to 2100 L/min [3nm Filter] Porous PTFE filter with a filtration precision of 0.003 micrometers [Maximum Operating Temperature] 80°C in inert gas Please inquire about filter lifespan for CDA applications exceeding 60°C [Maximum Operating Pressure] 1.72 MPa [Clean Room Manufacturing] Manufactured in a clean room, handling operations are particle-free, chemical-free, and organic material-free [100% Helium Leak Test] <1×10 -9 atm cc/sec ◇◇◇ For more details, please refer to the product catalog ◇◇◇
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Applications/Examples of results
- General and process inert gases for semiconductors, flat panel displays, and other high-purity applications - Gases used in critical flat panel processes such as substrate annealing - Clean dry air (CDA) for important processes including cleaning and exposure of front opening unified pods (FOUP)
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Company information
Air Water Mechatronics Co., Ltd. ST Division handles excellent measurement/control equipment focused on the most important themes of pressure and flow in the field of measurement and control in the industrial sector. In pressure measurement, as the Japanese distributor for Setra Systems, we have supplied numerous pressure sensors domestically for many years. Setra's pressure sensors are characterized by high precision and sensitivity, and are used in many advanced technologies, including semiconductor manufacturing equipment. Additionally, to accommodate various industrial pressure measurement scenarios, we also handle products from companies such as BD and Honeywell. We manufacture digital pressure gauges that incorporate or externally attach these pressure sensors. Within our company, various pressure standards with traceability to national standards are installed in a strictly air-conditioned calibration inspection room, allowing us to conduct inspections and recalibrations in-house. Regarding flow measurement, we offer unique and high-value-added products for both liquid and gas (mass flow). For liquids, we primarily provide small, cost-effective, and highly accurate turbine flow meters, as well as Coriolis flow meters. We respond to diverse needs with disposable sensors for pharmaceutical and medical manufacturing, as well as certified sensors for food and beverage applications.