This is a high-performance inline gas filter for semiconductor gas filtration, with a filtration precision of 0.003 microns.
GasPro filters are specially designed for semiconductor gas filtration. They feature an all-welded structure that achieves a filtration precision of 0.003 microns, even in situations where high flow rates are required and space is limited. The media material is PTFE, and the welded housing is made of electropolished SUS316L. To ensure cleanliness, they are purged with filtered nitrogen before shipping. Various connection types are available for easy installation.
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basic information
[Flow Rate] 0 to 2900 L/min [Filter Media] PTFE [Other Materials] Fluoropolymer/FEP coated Viton [3nm Filter] Porous PTFE filter with a filtration accuracy of 0.003 microns [Maximum Operating Temperature] 150°C [Maximum Operating Pressure] 1.72 MPa [Clean Room Manufacturing] Manufactured in a clean room, handling operations are particle-free, chemical-free, and organic substance-free [100% Helium Leak Test] <1×10 -9 atm cc/sec ◇◇◇ For more details, please refer to the product catalog ◇◇◇
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Applications/Examples of results
- Point-of-use semiconductor specialty gas filtration - Supply of inert gases and specialty gases - High flow ultra-high purity inert gases and specialty gases - Semiconductor, TFT flat panel display, silicon wafer manufacturing, solar power/solar process gases
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Company information
Air Water Mechatronics Co., Ltd. ST Division handles excellent measurement/control equipment focused on the most important themes of pressure and flow in the field of measurement and control in the industrial sector. In pressure measurement, as the Japanese distributor for Setra Systems, we have supplied numerous pressure sensors domestically for many years. Setra's pressure sensors are characterized by high precision and sensitivity, and are used in many advanced technologies, including semiconductor manufacturing equipment. Additionally, to accommodate various industrial pressure measurement scenarios, we also handle products from companies such as BD and Honeywell. We manufacture digital pressure gauges that incorporate or externally attach these pressure sensors. Within our company, various pressure standards with traceability to national standards are installed in a strictly air-conditioned calibration inspection room, allowing us to conduct inspections and recalibrations in-house. Regarding flow measurement, we offer unique and high-value-added products for both liquid and gas (mass flow). For liquids, we primarily provide small, cost-effective, and highly accurate turbine flow meters, as well as Coriolis flow meters. We respond to diverse needs with disposable sensors for pharmaceutical and medical manufacturing, as well as certified sensors for food and beverage applications.
