Customization to fit your equipment is also possible! Efficient analysis even for complex models.
"Particle-PLUS" is a simulation software suitable for the research, development, and manufacturing of devices and materials using plasma. It allows for fast results without the need to simulate the entire device by combining axisymmetric models and mirror-symmetric boundary conditions. It supports 2D (two-dimensional) and 3D (three-dimensional) analyses, enabling efficient analysis even for complex models. 【Features】 ■ Specializes in low-pressure plasma analysis ■ Allows for fast results without the need to simulate the entire device by combining axisymmetric models and mirror-symmetric boundary conditions ■ Excels in plasma simulation for low-pressure gases, where calculations using fluid models are challenging ■ Supports 2D (two-dimensional) and 3D (three-dimensional) analyses, enabling efficient analysis even for complex models ■ As a strength of our in-house developed software, customization to fit customer devices is also possible *For more details, please refer to the PDF materials or feel free to contact us.
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basic information
Various calculation results output ■ Potential distribution ■ Density distribution/temperature distribution/generation distribution of electrons and ions ■ Particle flux and energy flux to the wall ■ Energy spectrum of electrons and ions at the wall ■ Density distribution/temperature distribution/velocity distribution of neutral gas *For more details, please refer to the PDF materials or feel free to contact us.
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Applications/Examples of results
【Responding to various cases】 ■ Magnetron sputtering ■ PVD, plasma CVD ■ Capacitive coupled plasma (CCP) ■ Dielectric barrier discharge (DBD) ■ Electrophoresis *For more details, please refer to the PDF document or feel free to contact us.
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