【For ~300mm wafers】World-class high-speed transport in a vacuum! Achieves significant improvement in equipment throughput with a high-speed, low-vibration double-arm vacuum robot.
■Achieves world-class high-speed transport (650 WPH) in a vacuum environment ■Significantly reduces vibrations during arm movement with the incorporation of a direct drive motor ■Uses a steel belt in the arm section to improve trajectory accuracy and positioning precision ■Employs high-friction pads in the hand section to prevent wafer transport misalignment ■Equipped with a wafer center position deviation correction function *Please feel free to contact us for more details.
Inquire About This Product
basic information
【Specifications】 ■Operating Range ・X1, X2-axis: 620mm ・θ-axis: 346° ・Z-axis: 50mm ■Maximum Operating Speed ・X1, X2-axis: 380°/sec ・θ-axis: 300°/sec ・Z-axis: 185mm/sec ■Repeat Position Accuracy ・±0.1mm in each XYZ direction ■Payload: 2.0kg (Including E/E, E/E-base, Wafer) ■Body Weight: 160kg ■Installation Environment ・Temperature: 5-40℃ (Body) / 5-80℃ (Arm) ・Humidity: 20-70%, No condensation ・Pressure: Atmospheric pressure ～ 10-6Pa *For more details, please feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
For more details, please feel free to contact us.
Company information
Since its establishment in 1919, Daihen has been engaged in the development of products necessary for society, such as transformers, welding machines, industrial robots, and high-frequency power supplies for semiconductor manufacturing equipment, contributing to the advancement of power infrastructure that underpins daily life and the evolution and development of global manufacturing. Now, as a new step, we aim to become a "research and development-oriented company" that directly addresses social issues. Through the development of energy management systems that contribute to the expansion of renewable energy use, charging infrastructure essential for the spread of EVs, and new joining processes that aid in vehicle weight reduction, we aim to contribute to the realization of a decarbonized society with our "Green Solutions." Additionally, we strive to address "labor shortages" and the "diversification of workers and work styles" by providing optimal problem-solving methods through "Tailored Solutions," which are essentially "custom-made" robotic systems tailored to the specific circumstances of our manufacturing customers. By focusing on these areas and strengthening our development efforts, we will continue to introduce products with unique value to the market, aiming to delight our customers and contribute to society more than ever before.