【For ~300mm wafers】 High mobility transport and wide-range operation possible! Thanks to high-speed power line communication technology, the number of internal wiring in the robot body and the number of external cables are reduced.
■ By utilizing high-speed power line communication technology, the number of internal wiring and external cables in the robot body has been significantly reduced. ■ The integration of the servo amplifier into the robot has allowed for miniaturization of the controller. ■ High portable transport (total mass of hand holder, hand, and transport work of 4kg) is possible, enabling the installation of a reversing axis. It allows for tape frame-equipped wafer transport, bonded wafer transport, and reticle transport. ■ Work gripping can accommodate three methods: vacuum suction, edge clamp using compressed air, and Bernoulli method. ■ The Bernoulli hand is expected to support contact gripping of the rear surface of the outer circumference of TAIKO wafers. * For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Specifications】 ■ Operating Range ・X1, X2-axis: 500mm ・θ-axis: 340° ・Z-axis: 300mm or 450mm ■ Maximum Operating Speed ・X1, X2-axis: 1000mm/sec ・θ-axis: 200°/sec ・Z-axis: 250mm/sec ■ Repeat Position Accuracy: ±0.1mm in each XYZ direction ■ Payload Weight: 4.0kg/arm (Including E/E, E/E-base, Wafer) ■ Main Body Weight: 50kg *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
Line up（2）
| Model number | overview |
|---|---|
| UT-AFW4010NM | Category: Long Arm Type Load Capacity: 1kg/2N･m |
| UT-AFW4000NM | Category: High Payload Type Load Capacity: 4kg/8N･m |
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Company information
Since its establishment in 1919, Daihen has been engaged in the development of products necessary for society, such as transformers, welding machines, industrial robots, and high-frequency power supplies for semiconductor manufacturing equipment, contributing to the advancement of power infrastructure that underpins daily life and the evolution and development of global manufacturing. Now, as a new step, we aim to become a "research and development-oriented company" that directly addresses social issues. Through the development of energy management systems that contribute to the expansion of renewable energy use, charging infrastructure essential for the spread of EVs, and new joining processes that aid in vehicle weight reduction, we aim to contribute to the realization of a decarbonized society with our "Green Solutions." Additionally, we strive to address "labor shortages" and the "diversification of workers and work styles" by providing optimal problem-solving methods through "Tailored Solutions," which are essentially "custom-made" robotic systems tailored to the specific circumstances of our manufacturing customers. By focusing on these areas and strengthening our development efforts, we will continue to introduce products with unique value to the market, aiming to delight our customers and contribute to society more than ever before.