【For ~300mm wafers】Significantly reduces internal and external cables of the robot body! Wafer transport robot equipped with power line communication technology.
■ By utilizing high-speed power line communication technology in the wiring design, the amount of internal and external cables in the robot body has been significantly reduced compared to conventional models, thereby lowering the risk of cable disconnection. ■ A variety of options are available, including load sensors, mapping sensors, and slide axes. ■ The integration of the servo amplifier into the robot has allowed for a more compact controller. * For more details, please refer to the PDF document or feel free to contact us.
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【Specifications】 ■ Operating Range ・X1, X2-axis: 500mm ・θ-axis: 340° ・Z-axis: 300mm or 450mm ■ Maximum Operating Speed ・X1, X2-axis: 1000mm/sec ・θ-axis: 200°/sec ・Z-axis: 250mm/sec ■ Repeat Position Accuracy: ±0.1mm in each XYZ direction ■ Payload Weight: 1.0kg/arm (Including E/E, E/E-base, Wafer) ■ Main Body Weight: 32kg *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Company information
Since its establishment in 1919, Daihen has been engaged in the development of products necessary for society, such as transformers, welding machines, industrial robots, and high-frequency power supplies for semiconductor manufacturing equipment, contributing to the advancement of power infrastructure that underpins daily life and the evolution and development of global manufacturing. Now, as a new step, we aim to become a "research and development-oriented company" that directly addresses social issues. Through the development of energy management systems that contribute to the expansion of renewable energy use, charging infrastructure essential for the spread of EVs, and new joining processes that aid in vehicle weight reduction, we aim to contribute to the realization of a decarbonized society with our "Green Solutions." Additionally, we strive to address "labor shortages" and the "diversification of workers and work styles" by providing optimal problem-solving methods through "Tailored Solutions," which are essentially "custom-made" robotic systems tailored to the specific circumstances of our manufacturing customers. By focusing on these areas and strengthening our development efforts, we will continue to introduce products with unique value to the market, aiming to delight our customers and contribute to society more than ever before.