[For ~300mm wafers] Operates over a wide range without a travel axis! A wafer transport robot that accommodates various device layouts.
■ Wafer transport robot that operates over a wide range without a travel axis ■ Capable of accessing a wide area of 2.7m in the horizontal direction and 1.6m in the vertical direction, accommodating various equipment layouts ■ One robot can access 4 FOUPs, with the capability to access up to 8 FOUPs ■ The double-arm mechanism allows for simultaneous wafer exchange operations, enabling space-saving and improved throughput * For more details, please refer to the PDF document or feel free to contact us.
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【Specifications】 ■ Operating Range - X1, X2-axis (front and back): 590mm - θ-axis (rotation): 332° - Z-axis (up and down): 310-703.8mm - Y-axis (left and right): ±767.5mm - A-axis (left and right tilt correction): ±2° ■ Maximum Operating Speed - X1, X2-axis: 1600mm/sec - θ-axis: 540°/sec - Z-axis: 1500mm/sec - Y-axis: 1500mm/sec ■ Repeat Position Accuracy - XθY directions (composite): ±0.1mm - Z direction: ±0.1mm ■ Payload: 0.5kg/arm (Including E/E, E/E-base, Wafer) ■ Main Body Weight: 74kg *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Company information
Since its establishment in 1919, Daihen has been engaged in the development of products necessary for society, such as transformers, welding machines, industrial robots, and high-frequency power supplies for semiconductor manufacturing equipment, contributing to the advancement of power infrastructure that underpins daily life and the evolution and development of global manufacturing. Now, as a new step, we aim to become a "research and development-oriented company" that directly addresses social issues. Through the development of energy management systems that contribute to the expansion of renewable energy use, charging infrastructure essential for the spread of EVs, and new joining processes that aid in vehicle weight reduction, we aim to contribute to the realization of a decarbonized society with our "Green Solutions." Additionally, we strive to address "labor shortages" and the "diversification of workers and work styles" by providing optimal problem-solving methods through "Tailored Solutions," which are essentially "custom-made" robotic systems tailored to the specific circumstances of our manufacturing customers. By focusing on these areas and strengthening our development efforts, we will continue to introduce products with unique value to the market, aiming to delight our customers and contribute to society more than ever before.