Continuous measurement of impurities in gas can be performed within 1 minute per cycle! Being portable, it allows for measurement at the point of use.
The "FLEX-MS Series" is a high-sensitivity gas analysis device that uses atmospheric pressure ionization mass spectrometry (API method). It can measure impurities (mass numbers 3 to 400) in high-purity gases at the ppb level. Impurities can be measured in the range of 10 ppb to 0.1 ppb. The power supply operates at AC100V. 【Features】 ■ Direct introduction of the target gas is possible ■ Impurities can be measured in the range of 10 ppb to 0.1 ppb ■ Time variation measurements can be performed with concentration display using registered calibration curves ■ Portable type allows for measurements at the point of use ■ Operates on AC100V power supply *For more details, please refer to the PDF document or feel free to contact us.
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【Lineup】 ■FLEX-MS400 ■FLEX-MS400H *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Our company wishes for the further development of the Atmospheric Pressure Ionization Mass Spectrometry (APIMS) and provides services related to high-sensitivity gas analysis technologies centered around APIMS. We handle high-sensitivity gas analysis equipment such as the "FLEX-MS400," film permeability evaluation devices (registered as an inspection method under ISO), and temperature-programmed desorption gas measurement devices. It is used for monitoring high-purity nitrogen gas in the curation facilities for opening the capsules of Kamiokande's XMASS and JAXA's Hayabusa2 (planetary material sample acceptance facilities).
