TOF-SIMS can analyze light elements and inorganic substances as well as large organic molecules.
■TOF-SIMS Three Analysis Modes - High-resolution mass spectrum - Depth profiling - Surface mapping
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basic information
TOF-SIMS irradiates pulsed primary ions and performs mass analysis based on the flight time of the excited emitted ions. Ions with larger mass take longer to reach the detector, allowing for mass separation.
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Applications/Examples of results
- Molecular structure of phthalocyanine green in green pigments - Depth direction analysis of thin film a-Si solar cells - Surface analysis of Si wafer contamination
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Company information
Aites was established in 1993, originating from the quality assurance department of the IBM Japan Yasu office. Based on the technical expertise cultivated through cutting-edge defect analysis and reliability assurance of electronic components at the IBM Japan Yasu office, we have provided various products and services that support the development and manufacturing of semiconductors, displays, organic EL, solar cells, and electronic components to customers both domestically and internationally.