Macmillan Ultra High Purity Liquid Flow Sensor Model U709
Macmillan Ultra High Purity Liquid Flow Sensor Model U709
The model U709 can accurately measure corrosive liquids from a low flow rate of 7 mL/min to 1000 mL/min in both intermittent and continuous operation.
The Model U709 series is a flow sensor that covers five measurement ranges for corrosive liquids, from a low flow rate of 7 mL/min to approximately 1000 mL/min. It is capable of accurately measuring liquids in both intermittent and continuous operation. It can detect liquids with a pump discharge time of 500 msec and a discharge volume starting from 1 mL. The wetted parts are made of Teflon, Kalrez, and sapphire. The sensor employs a Pelton-type micro-turbine wheel (patented), making it suitable for ultra-clean applications. It generates no particles, achieves excellent reproducibility, and allows for accurate long-term measurement of corrosive chemicals and solvents. The pressure connection uses a flare-type fitting for easy connection, designed to prevent fluid from entering the threaded area. An 1.8 m cable is included for electrical connection. Power supply and output options can be selected from several choices, allowing for use in various applications.
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The Model U709 series is a flow sensor that covers five measurement ranges for corrosive liquids, from a low flow rate of 7 mL/min to approximately 1000 mL/min. It is capable of accurately measuring liquids in both intermittent and continuous operation. It can detect liquids with a pump discharge time of 500 msec and a discharge volume starting from 1 mL. The wetted parts are made of Teflon, Kalrez, and sapphire. The sensor employs a Pelton-type micro-turbine wheel (patented), making it suitable for ultra-clean applications. It generates no particles, achieves excellent reproducibility, and allows for accurate long-term measurement of corrosive chemicals and solvents. The pressure connection uses a flare-type fitting for easy connection, designed to prevent fluid from entering the threaded parts. An 1.8 m cable is included for electrical connection. Power supply and output options can be selected from several choices, allowing for use in various applications.
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Applications/Examples of results
Liquid compatible with Teflon, Kalrez, and sapphire for the liquid contact parts. ■ Measurement of liquids in intermittent and continuous operation ■ Capable of detecting cycles of 500 msec/1 mL ■ Monitoring of photoresist liquid discharge volume ■ Compatible with viscosities up to 80 cSt ■ Measurement of hydrofluoric acid and other acid lines ■ Measurement of CMP slurry lines ■ Measurement of pure water ■ Measurement of almost all low-viscosity liquids, etc.
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Air Water Mechatronics Co., Ltd. ST Division handles excellent measurement/control equipment focused on the most important themes of pressure and flow in the field of measurement and control in the industrial sector. In pressure measurement, as the Japanese distributor for Setra Systems, we have supplied numerous pressure sensors domestically for many years. Setra's pressure sensors are characterized by high precision and sensitivity, and are used in many advanced technologies, including semiconductor manufacturing equipment. Additionally, to accommodate various industrial pressure measurement scenarios, we also handle products from companies such as BD and Honeywell. We manufacture digital pressure gauges that incorporate or externally attach these pressure sensors. Within our company, various pressure standards with traceability to national standards are installed in a strictly air-conditioned calibration inspection room, allowing us to conduct inspections and recalibrations in-house. Regarding flow measurement, we offer unique and high-value-added products for both liquid and gas (mass flow). For liquids, we primarily provide small, cost-effective, and highly accurate turbine flow meters, as well as Coriolis flow meters. We respond to diverse needs with disposable sensors for pharmaceutical and medical manufacturing, as well as certified sensors for food and beverage applications.