This is a flow sensor that can accurately measure flow rates from 15 mL to 10 L/min. Made of PTFE, it has excellent chemical resistance and does not generate particles.
Model 106 is a sensor that can measure low-viscosity liquids from a low flow rate of 15 mL/min to a large flow rate of 10 L/min. It employs a Belton-type microturbine wheel (patented) that enables long-term accurate measurements with excellent reproducibility. The design is adapted for ultra-clean applications, ensuring no particle generation. The standard connection uses PFA-type tube fittings. The sensor's power supply, output type, fitting size, and cable length can be selected according to various applications. Flare fittings are also available as an option.
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Model 106 is a sensor capable of measuring low viscosity liquids from a low flow rate of 15 mL/min to a large flow rate of 10 L/min. It employs a Belton-type micro turbine wheel (patented) that allows for long-term accurate measurements with excellent reproducibility. This ultra-clean design wheel is supported by a sapphire shaft and bearings. During liquid measurement, it rotates in a suspended state due to its lightweight, eliminating wear on the shaft and bearings and preventing particle generation. The main body is made of PTFE, and the standard connection uses PFA-type tube fittings. The sensor power supply, output signal, fitting size, and cable length can be selected according to various applications. Flare fittings are also available as an option.
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Applications/Examples of results
Material for liquid contact parts: Teflon, suitable for liquids such as Calrets and Sapphire. ○ Measurement of hydrofluoric acid and other acidic lines ○ Measurement of CMP slurry lines ○ Measurement of pure water ○ Measurement of developer solutions ○ Measurement of almost all low-viscosity liquids, etc.
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Air Water Mechatronics Co., Ltd. ST Division handles excellent measurement/control equipment focused on the most important themes of pressure and flow in the field of measurement and control in the industrial sector. In pressure measurement, as the Japanese distributor for Setra Systems, we have supplied numerous pressure sensors domestically for many years. Setra's pressure sensors are characterized by high precision and sensitivity, and are used in many advanced technologies, including semiconductor manufacturing equipment. Additionally, to accommodate various industrial pressure measurement scenarios, we also handle products from companies such as BD and Honeywell. We manufacture digital pressure gauges that incorporate or externally attach these pressure sensors. Within our company, various pressure standards with traceability to national standards are installed in a strictly air-conditioned calibration inspection room, allowing us to conduct inspections and recalibrations in-house. Regarding flow measurement, we offer unique and high-value-added products for both liquid and gas (mass flow). For liquids, we primarily provide small, cost-effective, and highly accurate turbine flow meters, as well as Coriolis flow meters. We respond to diverse needs with disposable sensors for pharmaceutical and medical manufacturing, as well as certified sensors for food and beverage applications.