Power device failure location / Slice & View three-dimensional reconstruction

I will introduce the three-dimensional reconstruction of failure locations using the Slice & View function of FIB-SEM.
Continuous SEM images of the structure are acquired, and the obtained images are corrected for positional misalignment between SEM images and visualized in three dimensions using 3D construction software (Avizo).
By combining the position identification technique for cross-sectioning the failure location with the Slice & View function, it is possible to obtain continuous SEM images that retain the defective state and include information before and after the abnormal area.

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