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  3. ウシオ電機
  4. We will be exhibiting at SEMICON Japan 2024.
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  • Aug 24, 2024
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Aug 24, 2024

We will be exhibiting at SEMICON Japan 2024.

ウシオ電機 ウシオ電機
Our company will be exhibiting at SEMICON Japan 2024, which will be held at Tokyo Big Sight from December 11 (Wednesday) to December 13 (Friday). As in previous years, we will be showcasing various optical heating products, and we look forward to your visit.
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Third light heating source! LED annealing device

Energy saving through improved heating efficiency! Achieving reduced thermal budget with high responsiveness.

The "LED Annealing Device" is the third light heating source following halogen heaters and flash lamps. It achieves energy savings through improved heating efficiency and reduces thermal budget with high-speed responsiveness. Real-time temperature measurement using a radiation thermometer is possible. Additionally, it can heat the surface of substrates and demonstrates excellent heating efficiency for metal materials. 【Features】 ■ Improved heating efficiency ■ High-speed responsiveness ■ High-precision temperature measurement ■ High uniformity ■ Capability to heat substrate surfaces *For more details, please refer to the PDF document or feel free to contact us.

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Flash Lamp Annealing Device "SUS980 Series"

Depending on the work size, multiple flash lamps can be arranged! Large area simultaneous irradiation and high-intensity irradiation are possible!

The "SUS980 Series" is a flash lamp annealing device that can be used for applications such as crystallization, peeling, and oxide film formation. By controlling the current flowing through the lamp with a semiconductor switch to turn it ON/OFF, the pulse width of the lamp current can be adjusted, allowing for control of the heating depth (0.1 to 60 msec). Multiple flash lamps can be arranged according to the work size for large-area simultaneous irradiation, enabling high irradiation. 【Features】 ■ Depth control (pulse control) ■ ON/OFF control of the current flowing through the lamp using a semiconductor switch ■ Adjustable lamp current pulse width for controlling heating depth (0.1 to 60 msec) ■ Multiple pulse irradiation is also possible ■ High output and large-area simultaneous processing (shortened tact time, high uniformity) *For more details, please refer to the PDF document or feel free to contact us.

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Direct heating is possible! Straight tube double tube halogen heater lamp QIRT.

Ideal as a heat source for food heating such as fryers! Double tube heater lamp with enhanced airtightness.

The "Straight Tube Double Tube Halogen Heater Lamp QIRT" is a lamp that can directly heat liquids such as water, chemicals, and oils by enhancing airtightness through its double tube structure. Additionally, the double tube structure increases safety by preventing scattering in the event of lamp breakage, making it suitable as a heat source for food heating applications such as fryers. In the custom-made system, it can be designed according to any dimensions, wavelengths, installation conditions, and characteristics. 【Lineup】 ■QIRT100V500W ■QIRT100V700W ■QIRT200V2000W ■QIRT200V2000WL *For more details, please refer to the PDF materials or feel free to contact us.

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Exhibits power in line heating and large area heating! Line heater unit.

Selectable based on the shape of the heating target and the irradiation range! Introduction of the heater unit.

The "Line Heater Unit" combines a heater lamp and a mirror, demonstrating its effectiveness in line heating and heating large areas. By narrowing down the dimensions and characteristics for standardization, it offers high cost performance, making it easy to introduce for prototype verification and experiments. Additionally, it can be customized to meet specific required characteristics. Please feel free to contact us when needed. 【Features】 ■ Combines a heater lamp and a mirror, demonstrating effectiveness in line heating and heating large areas ■ Standardized by narrowing down dimensions and characteristics ■ High cost performance ■ Easy to introduce for prototype verification and experiments ■ Customizable to meet specific required characteristics *For more details, please refer to the PDF document or feel free to contact us.

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High-temperature range exceeding 500℃! High-output line heater unit.

Select lamps, mirror shapes, and cooling methods tailored to the user's desired temperature, output, dimensions, and other characteristics!

The "High Output Line Heater Unit (Custom Made)" is a high-output product that enables light control in high-temperature ranges exceeding 500°C. We select lamps, mirror shapes, and cooling methods tailored to the user's desired temperature, output, and dimensions, providing a completely custom-made solution. We offer mirror shapes including the focus type, parabolic type P, and parabolic type N (compact type with gold-plated mirror specifications). 【Features】 ■ High-output line heater unit that enables light control in high-temperature ranges exceeding 500°C ■ Completely custom-made solutions by selecting lamps, mirror shapes, and cooling methods tailored to specific characteristics ■ Available in focus type, parabolic type P, and parabolic type N ■ Parabolic type can uniformly irradiate a wide area *For more details, please refer to the PDF document or feel free to contact us.

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Light Heating Comprehensive Catalog

High-efficiency energy source! Introducing light heating products such as infrared halogen heaters.

This catalog features light heating products centered around infrared halogen heaters. We offer a lineup including the straight tube halogen heater lamp "QIR," which can heat a wide area uniformly, and the circle-shaped halogen heater lamp "QIR Circle," suitable for high-temperature heating devices for silicon wafers. Additionally, we also introduce the "Flash Lamp Annealing Device SUS980 Series" and "LED Annealing Device." [Contents (partial)] ■ What is light heating? ■ Infrared halogen heaters ■ Applications of infrared halogen heaters ■ Types and special processing of infrared halogen heaters ■ Straight tube halogen heater lamp QIR *For more details, please refer to the PDF document or feel free to contact us.

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Light Application Heating Device "Flash Lamp Annealing Device"

A heating device capable of large-area simultaneous irradiation and high-intensity irradiation! It can also perform multiple pulse irradiations.

The "Flash Lamp Annealing Device" is a light-based heating device that instantaneously anneals objects within one second. Utilizing the light from a xenon flash lamp with a continuous wavelength range from UV to visible and infrared, it allows for variable settings within the range of 0.1 to 60 milliseconds. It can be used for various applications utilizing a wide spectrum, such as sintering, peeling, and surface modification. 【Features】 ■ Spectrum - Wide wavelength characteristics from ultraviolet to visible and infrared regions ■ High output and large area processing (shortened tact time, high uniformity) - Multiple flash lamps can be arranged according to the work size, enabling large area irradiation and high intensity (Max 70J/cm²) irradiation. *For more details, please refer to the PDF document or feel free to contact us.

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Circle-shaped halogen heater lamp QIR

Processing compatible with vacuum is possible! It can be utilized when heating is required for circular shapes or within a circular range!

The "QIR Circle Halogen Heater Lamp" is a circular lamp suitable for high-temperature heating devices such as silicon wafer heating systems. It can be utilized when heating in a circular shape or within a circular range is required. Custom designs can be made according to desired sizes and characteristics, and processing for vacuum compatibility is also possible. In the custom-made system, designs can be tailored to any dimensions, wavelengths, installation conditions, and characteristics up to a maximum circle diameter of 500mm. 【Features】 ■ A circular lamp suitable for high-temperature heating devices such as silicon wafer heating systems ■ Can be utilized when heating in a circular shape or within a circular range is required ■ Custom designs can be made according to desired sizes and characteristics, and processing for vacuum compatibility is also possible ■ Designs can be tailored to any dimensions, wavelengths, installation conditions, and characteristics up to a maximum circle diameter of 500mm *For more details, please refer to the PDF document or feel free to contact us.

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[Case Study] Insulation and Heating of Liquids

[Case Study] Insulation and Heating of Liquids

This is an introduction to examples of liquid heating and temperature maintenance using light sources from Ushio, a company with a tradition and a wealth of achievements. 【Features】 ○ Capable of maintaining temperature and humidity for pure water and chemical solutions used in the cleaning of silicon wafers in semiconductor manufacturing lines and glass substrates in LCD manufacturing lines. ○ Composed of halogen lamps covered with high-quality quartz glass, resulting in minimal contamination from impurities and the ability to heat efficiently with an efficiency of over 95%. ● For other functions and details, please contact us.

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[Case Study] Preheating of Film Deposition Equipment

[Case Study] Preheating of Film Deposition Equipment

This is a case study of preheating in a film deposition system using light sources for light heating from Ushio, a company with a wealth of experience and achievements. By using halogen lamp heaters that possess non-contact and rapid heating capabilities even in a vacuum environment, we can contribute to reducing takt time in film deposition processes for semiconductors, FPDs, solar cells, and more. ● For other functions and details, please contact us.

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[Case Study] RTP (Rapid Thermal Process)

[Case Study] RTP (Rapid Thermal Process)

This is a case study of RTP using light sources for light heating from Ushio, a company with tradition and a wealth of achievements. In the past, semiconductor thermal processing commonly used furnaces (insulated), but for nano-order devices, thin film formation and shallow junctions are required, making RTP, synonymous with isothermal processes, a key technology. Additionally, in next-generation semiconductors, flash lamp annealing has become the mainstream technology as a thermal flux technique. ● For other functions and details, please contact us.

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What can be done with Ushio's light: Heating 'joining'

What can be done with Ushio's light: Heating "Joining"

This is an introduction to practical examples (joining) of Ushio's light sources for light heating, which has a tradition and a wealth of achievements. 【Features】 ○ Light source used: Halogen lamp heater ○ Halogen heaters are used for pipe welding of various heat sinks ○ The light from the halogen heater is emitted as radiant heat, making it less affected by the surrounding environment compared to hot air types, allowing for rapid heating to the desired temperature ○ Unlike heating with gas burners, it is suitable for reducing CO2 environmental impact ● For other functions and details, please contact us.

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What can be done with Ushio's light: "Impurity Diffusion"

What can be done with Ushio's light: "Impurity Diffusion"

This is an introduction to practical examples of Ushio's light sources for light heating, which have a rich and comprehensive track record (impurity diffusion). 【Features】 ○ Light sources used: Xenon flash lamp, halogen heater lamp ○ In the semiconductor process, implantation is performed on the source drain, followed by an annealing process to activate the doped impurities. ○ Utilizing the characteristics of the xenon flash lamp, it is possible to perform high-temperature annealing in a very short time frame (on the order of milliseconds) to extremely shallow depths (on the order of nm) compared to the previous active layer depth, thereby preventing impurity diffusion. ● For other functions and details, please contact us.

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What can be done with Ushio's light: "Heating/Film Formation"

What can be done with Ushio's light: "Heating / Film Formation"

This is an introduction to practical examples of Ushio's light sources for light heating (heating/thin film deposition), which has a tradition and a wealth of achievements. 【Features】 ○ Light source used: Halogen lamp heater ○ Optimal as a heat source for CVD and sputtering equipment used in the manufacturing processes of semiconductors, FPDs, and solar cells for the formation of metal films and insulating films. ○ Additionally, by using halogen lamp heaters for moisture removal and preheating before film deposition, it achieves improved throughput and high-quality film formation. ● For other functions and details, please contact us.

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Ideal for heating silicon wafers and glass lenses! Circle heater unit.

Designed through 3D reflection light simulation! Excellent heating uniformity and temperature rise performance.

The "Circle Heater Unit" is a product suitable for rapid heating of silicon wafers and pre-heating of glass lenses before molding. The reflector and lamp, designed through 3D reflection light simulation, are appropriately arranged. It has excellent heating uniformity and temperature rise performance. Please feel free to contact us when you need assistance. 【UL-HU-CH36KW/STD Specifications (Excerpt)】 ■ Rated Voltage: 200V ■ Power Consumption: 36kW ■ Unit Outer Diameter: 470mm ■ Unit Depth: 235.5mm ■ Weight: 30kg *For more details, please refer to the PDF materials or feel free to contact us.

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Related catalog(5)

Light Heating Comprehensive Catalog

Light Heating Comprehensive Catalog

CATALOG
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Light Application Heating Device "Flash Lamp Annealing Device"

Light Application Heating Device "Flash Lamp Annealing Device"

PRODUCT
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Halogen heater unit

Halogen heater unit

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Halogen lamp heater

Halogen lamp heater

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LED Annealing Catalog

LED Annealing Catalog

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[Please introduce this to the management and general affairs department] Update on the expense reimbursement system implementation case! The input and verification work for FB data that used to take 2-3 hours is now completed in just 5 minutes!

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An article has been published about the case of introducing the expense reimbursement system "Rakuraku Seisan" at TSP Corporation. ~ In the case of TSP ~ Before the introduction, there were challenges such as dealing with the "paper" sent from various locations and the reliance on specific individuals for the tasks. After the introduction, the input and checking of FB data, which used to take 2 to 3 hours, can now be completed in just 5 minutes. Additionally, the mindset of the accounting department, which was previously reliant on manual entry, has changed. [Case Overview] ■ Challenges before introduction - Dealing with "paper" sent from various locations, reliance on specific individuals ■ Key points of introduction - A robust support system for setup and operation - Easy to start from a small scale both financially and functionally *For more details, please refer to the related links or feel free to contact us.

Jul 02, 2026

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We have released the document 'Half a year of slacking vs. full operation in 3 months - Conditions for companies that should use initial setup support!'

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We have published a white paper titled "Half a Year of Procrastination vs. Full Operation in 3 Months - Conditions for Companies That Should Use Initial Setup Support," aimed at companies considering the introduction and operation of attendance management systems. This document clearly explains the key points of initial setup that are prone to difficulties during implementation, as well as the differences between handling it in-house and utilizing specialized support. If you want to smoothly launch an attendance management system, please take a look.

Jul 01, 2026

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Summer Grand Thanksgiving Festival 2026

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  • EVENT

From July 2026 until the end of September, we will hold a Summer Grand Appreciation Festival! High-pressure washers at great prices! Plan 1: A special set of SP60L/60new/60DX/60GE comes with a free Z swivel joint set! Plan 2: Customers who purchase a compressor will receive a new red hose (30m) for free! Plan 3: Washing hose [6M] available at a special price! A wide range of popular high-pressure washer series, cleaning accessories, painting machines, compressors, and other products are also available! Items listed can be purchased at great deals! Don't miss this opportunity!

Jul 01, 2026

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Notice of Envu Ant Bait Certification Renewal

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(Japan) Termite Control Association Hachikusan FL No. 3359 (Japan) Termite Control Association Hachikusan MC No. 3511 The update from July 1, 2026, is now available.

Jul 01, 2026

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[Please be sure to introduce this to the management and general affairs department] Update on the introduction case of the attendance management system! With the thorough support of our sales representatives, you can rest assured about the configuration changes tailored to your regulations.

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An article has been published regarding the case of introducing the attendance management system "KING OF TIME" to G.C. Planning Co., Ltd. ~ In the case of G.C. Planning ~ The previous attendance management system had the challenge of making it difficult to check attendance in compliance with laws and regulations. The decision to implement was based on top-class implementation achievements and the unique support system of the agency, i Business Partners. Although there were moments that felt challenging during the implementation and operation, we resolved each issue by consulting with the sales representatives of iBP. [Case Overview] ■ Challenges before implementation - The previous attendance management system made it difficult to check attendance in compliance with laws and regulations. ■ Key points of implementation - Top-class implementation achievements and the unique support system of the agency, i Business Partners. *For more details, please refer to the related links or feel free to contact us.

Jun 30, 2026

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