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  6. What can be done with Ushio's light: "Heating/Film Formation"

What can be done with Ushio's light: "Heating/Film Formation"

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last updated:Dec 07, 2023

ウシオ電機
ウシオ電機
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What can be done with Ushio's light: "Heating / Film Formation"

This is an introduction to practical examples of Ushio's light sources for light heating (heating/thin film deposition), which has a tradition and a wealth of achievements. 【Features】 ○ Light source used: Halogen lamp heater ○ Optimal as a heat source for CVD and sputtering equipment used in the manufacturing processes of semiconductors, FPDs, and solar cells for the formation of metal films and insulating films. ○ Additionally, by using halogen lamp heaters for moisture removal and preheating before film deposition, it achieves improved throughput and high-quality film formation. ● For other functions and details, please contact us.

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What can be done with Ushio's light: "Heating/Film Formation"

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  • Related Link - https://www.ushio.co.jp/jp/feature/thermal/

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basic information

This is an introduction to practical examples of Ushio's light sources for light heating (heating/thin film deposition), which have a tradition and a wealth of achievements. 【Features】 ○ Light source used: Halogen lamp heater ○ Optimal as a heat source for CVD and sputtering equipment used in the manufacturing processes of semiconductors, FPDs, and solar cells for forming metal films and insulating films. ○ Additionally, by using halogen lamp heaters for moisture removal and preheating before film deposition, it achieves improved throughput and high-quality film formation. ● For other functions and details, please contact us.

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Applications/Examples of results

【Usage】 ○CVD ○Sputtering equipment

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Light Heating Comprehensive Catalog

Light Heating Comprehensive Catalog

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Light Application Heating Device "Flash Lamp Annealing Device"

Light Application Heating Device "Flash Lamp Annealing Device"

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We will be exhibiting at SEMICON Japan 2024.

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Our company will be exhibiting at SEMICON Japan 2024, which will be held at Tokyo Big Sight from December 11 (Wednesday) to December 13 (Friday). As in previous years, we will be showcasing various optical heating products, and we look forward to your visit.

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ウシオ電機

ウシオ電機

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Heating, hardening, cleaning, modification, surface treatment, adhesion, exposure, lighting, treatment, measurement, and testing... When it comes to "light," leave it to Ushio. From light sources to units and light devices, we propose the optimal "light" tailored to our customers' objectives and applications using our unique light technology (we also offer joint experiments, joint research, and lending of demo and experimental equipment).

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