An example of "Particle-PLUS" analysis of magnetron sputtering using a cylindrical target, which is one method for forming a strong film on the inside of a long cylinder.
"Particle-PLUS" is a simulation software suitable for the research, development, and manufacturing of devices and materials using plasma.
- It specializes in low-pressure plasma analysis.
- By combining axisymmetric models with mirror-symmetric boundary conditions, it can quickly obtain results without the need for full device simulations.
- It excels in plasma simulations for low-pressure gases, where calculations using fluid models are challenging.
- It supports 2D (two-dimensional) and 3D (three-dimensional) analyses, allowing for efficient analysis of complex models.
- As a strength of our in-house developed software, customization to fit the customer's device is also possible.
◆ Supports various cases ◆
- Magnetron sputtering
- PVD, plasma CVD
- Capacitively coupled plasma (CCP)
- Dielectric barrier discharge (DBD)
- Electrophoresis, etc.
◆ Outputs various calculation results ◆
- Potential distribution
- Electron and ion density distribution/temperature distribution/generation distribution
- Particle flux and energy flux to the wall
- Energy spectrum of electrons and ions at the wall
- Density distribution/temperature distribution/velocity distribution of neutral gas, etc.
*For more details, please feel free to contact us.