Compatible with 150℃/200℃! Ideal diaphragm vacuum gauge for biopharmaceutical manufacturing.
The latest model from MKS, which has a long track record in high-temperature controlled vacuum gauges, features a compact all-in-one design and energy efficiency.
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basic information
150℃/200℃ compatible! The Baratron vacuum gauge is ideal for biopharmaceutical manufacturing and semiconductor manufacturing processes. The Baratron 631B is MKS's latest compact model, having supplied high-temperature controlled vacuum gauges for over 10 years. By maintaining high temperatures within the sensor and preventing the deposition of process by-products on the sensor, it reduces drift and achieves accurate and long-term stable pressure measurements. The 631B, which allows for temperature control at 150℃ or 200℃, is suitable not only for semiconductor manufacturing processes under harsh conditions such as metal etching, nitride CVD, and ALD, but also for biopharmaceutical processes like freeze-drying and sterilization equipment that use steam to prevent bacterial growth. Features: ● Minimum full-scale range: 133×10E-2Pa ● Maximum full-scale range: 133×10E5Pa ● Accuracy: 0.50% of reading ● Operates on ±15VDC input power only, low power consumption (maximum 1.0A) ● Built-in relay function adjustable from external sources (optional)
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Applications/Examples of results
- Applications as a vacuum gauge for semiconductor manufacturing processes under stringent conditions - Biopharmaceutical processes such as freeze-drying equipment and sterilization equipment that use steam to prevent bacterial growth
Company information
Our company is a global leading company that provides cutting-edge manufacturing process technologies in growth industries, such as thin film applications for semiconductor devices, FPD, OLED, solar cells, data storage, and coatings, as well as industrial applications in medical devices, energy, environmental monitoring, and biopharmaceuticals. We offer worldwide support from service centers located around the world.