[Case Study] Preheating of Film Deposition Equipment
This is a case study of preheating in a film deposition system using light sources for light heating from Ushio, a company with a wealth of experience and achievements. By using halogen lamp heaters that possess non-contact and rapid heating capabilities even in a vacuum environment, we can contribute to reducing takt time in film deposition processes for semiconductors, FPDs, solar cells, and more. ● For other functions and details, please contact us.
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This is a case study of a preheating process for a film deposition device using light sources for light heating from Ushio, a company with a wealth of experience and achievements. By using a halogen lamp heater that has non-contact and rapid heating capabilities even in a vacuum environment, we can contribute to reducing the takt time in the film deposition processes for semiconductors, FPDs, solar cells, and more. ● For other functions and details, please contact us.
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Heating, hardening, cleaning, modification, surface treatment, adhesion, exposure, lighting, treatment, measurement, and testing... When it comes to "light," leave it to Ushio. From light sources to units and light devices, we propose the optimal "light" tailored to our customers' objectives and applications using our unique light technology (we also offer joint experiments, joint research, and lending of demo and experimental equipment).