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  3. ウシオ電機
  4. We will be exhibiting at SEMICON Japan 2024.
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  • Aug 24, 2024
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Aug 24, 2024

We will be exhibiting at SEMICON Japan 2024.

ウシオ電機 ウシオ電機
Our company will be exhibiting at SEMICON Japan 2024, which will be held at Tokyo Big Sight from December 11 (Wednesday) to December 13 (Friday). As in previous years, we will be showcasing various optical heating products, and we look forward to your visit.
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Third light heating source! LED annealing device

Energy saving through improved heating efficiency! Achieving reduced thermal budget with high responsiveness.

The "LED Annealing Device" is the third light heating source following halogen heaters and flash lamps. It achieves energy savings through improved heating efficiency and reduces thermal budget with high-speed responsiveness. Real-time temperature measurement using a radiation thermometer is possible. Additionally, it can heat the surface of substrates and demonstrates excellent heating efficiency for metal materials. 【Features】 ■ Improved heating efficiency ■ High-speed responsiveness ■ High-precision temperature measurement ■ High uniformity ■ Capability to heat substrate surfaces *For more details, please refer to the PDF document or feel free to contact us.

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Flash Lamp Annealing Device "SUS980 Series"

Depending on the work size, multiple flash lamps can be arranged! Large area simultaneous irradiation and high-intensity irradiation are possible!

The "SUS980 Series" is a flash lamp annealing device that can be used for applications such as crystallization, peeling, and oxide film formation. By controlling the current flowing through the lamp with a semiconductor switch to turn it ON/OFF, the pulse width of the lamp current can be adjusted, allowing for control of the heating depth (0.1 to 60 msec). Multiple flash lamps can be arranged according to the work size for large-area simultaneous irradiation, enabling high irradiation. 【Features】 ■ Depth control (pulse control) ■ ON/OFF control of the current flowing through the lamp using a semiconductor switch ■ Adjustable lamp current pulse width for controlling heating depth (0.1 to 60 msec) ■ Multiple pulse irradiation is also possible ■ High output and large-area simultaneous processing (shortened tact time, high uniformity) *For more details, please refer to the PDF document or feel free to contact us.

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Direct heating is possible! Straight tube double tube halogen heater lamp QIRT.

Ideal as a heat source for food heating such as fryers! Double tube heater lamp with enhanced airtightness.

The "Straight Tube Double Tube Halogen Heater Lamp QIRT" is a lamp that can directly heat liquids such as water, chemicals, and oils by enhancing airtightness through its double tube structure. Additionally, the double tube structure increases safety by preventing scattering in the event of lamp breakage, making it suitable as a heat source for food heating applications such as fryers. In the custom-made system, it can be designed according to any dimensions, wavelengths, installation conditions, and characteristics. 【Lineup】 ■QIRT100V500W ■QIRT100V700W ■QIRT200V2000W ■QIRT200V2000WL *For more details, please refer to the PDF materials or feel free to contact us.

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Exhibits power in line heating and large area heating! Line heater unit.

Selectable based on the shape of the heating target and the irradiation range! Introduction of the heater unit.

The "Line Heater Unit" combines a heater lamp and a mirror, demonstrating its effectiveness in line heating and heating large areas. By narrowing down the dimensions and characteristics for standardization, it offers high cost performance, making it easy to introduce for prototype verification and experiments. Additionally, it can be customized to meet specific required characteristics. Please feel free to contact us when needed. 【Features】 ■ Combines a heater lamp and a mirror, demonstrating effectiveness in line heating and heating large areas ■ Standardized by narrowing down dimensions and characteristics ■ High cost performance ■ Easy to introduce for prototype verification and experiments ■ Customizable to meet specific required characteristics *For more details, please refer to the PDF document or feel free to contact us.

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High-temperature range exceeding 500℃! High-output line heater unit.

Select lamps, mirror shapes, and cooling methods tailored to the user's desired temperature, output, dimensions, and other characteristics!

The "High Output Line Heater Unit (Custom Made)" is a high-output product that enables light control in high-temperature ranges exceeding 500°C. We select lamps, mirror shapes, and cooling methods tailored to the user's desired temperature, output, and dimensions, providing a completely custom-made solution. We offer mirror shapes including the focus type, parabolic type P, and parabolic type N (compact type with gold-plated mirror specifications). 【Features】 ■ High-output line heater unit that enables light control in high-temperature ranges exceeding 500°C ■ Completely custom-made solutions by selecting lamps, mirror shapes, and cooling methods tailored to specific characteristics ■ Available in focus type, parabolic type P, and parabolic type N ■ Parabolic type can uniformly irradiate a wide area *For more details, please refer to the PDF document or feel free to contact us.

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Light Heating Comprehensive Catalog

High-efficiency energy source! Introducing light heating products such as infrared halogen heaters.

This catalog features light heating products centered around infrared halogen heaters. We offer a lineup including the straight tube halogen heater lamp "QIR," which can heat a wide area uniformly, and the circle-shaped halogen heater lamp "QIR Circle," suitable for high-temperature heating devices for silicon wafers. Additionally, we also introduce the "Flash Lamp Annealing Device SUS980 Series" and "LED Annealing Device." [Contents (partial)] ■ What is light heating? ■ Infrared halogen heaters ■ Applications of infrared halogen heaters ■ Types and special processing of infrared halogen heaters ■ Straight tube halogen heater lamp QIR *For more details, please refer to the PDF document or feel free to contact us.

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Light Application Heating Device "Flash Lamp Annealing Device"

A heating device capable of large-area simultaneous irradiation and high-intensity irradiation! It can also perform multiple pulse irradiations.

The "Flash Lamp Annealing Device" is a light-based heating device that instantaneously anneals objects within one second. Utilizing the light from a xenon flash lamp with a continuous wavelength range from UV to visible and infrared, it allows for variable settings within the range of 0.1 to 60 milliseconds. It can be used for various applications utilizing a wide spectrum, such as sintering, peeling, and surface modification. 【Features】 ■ Spectrum - Wide wavelength characteristics from ultraviolet to visible and infrared regions ■ High output and large area processing (shortened tact time, high uniformity) - Multiple flash lamps can be arranged according to the work size, enabling large area irradiation and high intensity (Max 70J/cm²) irradiation. *For more details, please refer to the PDF document or feel free to contact us.

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Circle-shaped halogen heater lamp QIR

Processing compatible with vacuum is possible! It can be utilized when heating is required for circular shapes or within a circular range!

The "QIR Circle Halogen Heater Lamp" is a circular lamp suitable for high-temperature heating devices such as silicon wafer heating systems. It can be utilized when heating in a circular shape or within a circular range is required. Custom designs can be made according to desired sizes and characteristics, and processing for vacuum compatibility is also possible. In the custom-made system, designs can be tailored to any dimensions, wavelengths, installation conditions, and characteristics up to a maximum circle diameter of 500mm. 【Features】 ■ A circular lamp suitable for high-temperature heating devices such as silicon wafer heating systems ■ Can be utilized when heating in a circular shape or within a circular range is required ■ Custom designs can be made according to desired sizes and characteristics, and processing for vacuum compatibility is also possible ■ Designs can be tailored to any dimensions, wavelengths, installation conditions, and characteristics up to a maximum circle diameter of 500mm *For more details, please refer to the PDF document or feel free to contact us.

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[Case Study] Insulation and Heating of Liquids

[Case Study] Insulation and Heating of Liquids

This is an introduction to examples of liquid heating and temperature maintenance using light sources from Ushio, a company with a tradition and a wealth of achievements. 【Features】 ○ Capable of maintaining temperature and humidity for pure water and chemical solutions used in the cleaning of silicon wafers in semiconductor manufacturing lines and glass substrates in LCD manufacturing lines. ○ Composed of halogen lamps covered with high-quality quartz glass, resulting in minimal contamination from impurities and the ability to heat efficiently with an efficiency of over 95%. ● For other functions and details, please contact us.

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[Case Study] Preheating of Film Deposition Equipment

[Case Study] Preheating of Film Deposition Equipment

This is a case study of preheating in a film deposition system using light sources for light heating from Ushio, a company with a wealth of experience and achievements. By using halogen lamp heaters that possess non-contact and rapid heating capabilities even in a vacuum environment, we can contribute to reducing takt time in film deposition processes for semiconductors, FPDs, solar cells, and more. ● For other functions and details, please contact us.

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[Case Study] RTP (Rapid Thermal Process)

[Case Study] RTP (Rapid Thermal Process)

This is a case study of RTP using light sources for light heating from Ushio, a company with tradition and a wealth of achievements. In the past, semiconductor thermal processing commonly used furnaces (insulated), but for nano-order devices, thin film formation and shallow junctions are required, making RTP, synonymous with isothermal processes, a key technology. Additionally, in next-generation semiconductors, flash lamp annealing has become the mainstream technology as a thermal flux technique. ● For other functions and details, please contact us.

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What can be done with Ushio's light: Heating 'joining'

What can be done with Ushio's light: Heating "Joining"

This is an introduction to practical examples (joining) of Ushio's light sources for light heating, which has a tradition and a wealth of achievements. 【Features】 ○ Light source used: Halogen lamp heater ○ Halogen heaters are used for pipe welding of various heat sinks ○ The light from the halogen heater is emitted as radiant heat, making it less affected by the surrounding environment compared to hot air types, allowing for rapid heating to the desired temperature ○ Unlike heating with gas burners, it is suitable for reducing CO2 environmental impact ● For other functions and details, please contact us.

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What can be done with Ushio's light: "Impurity Diffusion"

What can be done with Ushio's light: "Impurity Diffusion"

This is an introduction to practical examples of Ushio's light sources for light heating, which have a rich and comprehensive track record (impurity diffusion). 【Features】 ○ Light sources used: Xenon flash lamp, halogen heater lamp ○ In the semiconductor process, implantation is performed on the source drain, followed by an annealing process to activate the doped impurities. ○ Utilizing the characteristics of the xenon flash lamp, it is possible to perform high-temperature annealing in a very short time frame (on the order of milliseconds) to extremely shallow depths (on the order of nm) compared to the previous active layer depth, thereby preventing impurity diffusion. ● For other functions and details, please contact us.

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What can be done with Ushio's light: "Heating/Film Formation"

What can be done with Ushio's light: "Heating / Film Formation"

This is an introduction to practical examples of Ushio's light sources for light heating (heating/thin film deposition), which has a tradition and a wealth of achievements. 【Features】 ○ Light source used: Halogen lamp heater ○ Optimal as a heat source for CVD and sputtering equipment used in the manufacturing processes of semiconductors, FPDs, and solar cells for the formation of metal films and insulating films. ○ Additionally, by using halogen lamp heaters for moisture removal and preheating before film deposition, it achieves improved throughput and high-quality film formation. ● For other functions and details, please contact us.

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Ideal for heating silicon wafers and glass lenses! Circle heater unit.

Designed through 3D reflection light simulation! Excellent heating uniformity and temperature rise performance.

The "Circle Heater Unit" is a product suitable for rapid heating of silicon wafers and pre-heating of glass lenses before molding. The reflector and lamp, designed through 3D reflection light simulation, are appropriately arranged. It has excellent heating uniformity and temperature rise performance. Please feel free to contact us when you need assistance. 【UL-HU-CH36KW/STD Specifications (Excerpt)】 ■ Rated Voltage: 200V ■ Power Consumption: 36kW ■ Unit Outer Diameter: 470mm ■ Unit Depth: 235.5mm ■ Weight: 30kg *For more details, please refer to the PDF materials or feel free to contact us.

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Related catalog(5)

Light Heating Comprehensive Catalog

Light Heating Comprehensive Catalog

CATALOG
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Light Application Heating Device "Flash Lamp Annealing Device"

Light Application Heating Device "Flash Lamp Annealing Device"

PRODUCT
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Halogen heater unit

Halogen heater unit

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Halogen lamp heater

Halogen lamp heater

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LED Annealing Catalog

LED Annealing Catalog

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[Please introduce this to the management and general affairs department] Update on the expense reimbursement system implementation case! The input and verification work for FB data that used to take 2-3 hours is now completed in just 5 minutes!

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An article has been published about the case of introducing the expense reimbursement system "Rakuraku Seisan" at TSP Corporation. ~ In the case of TSP ~ Before the introduction, there were challenges such as dealing with the "paper" sent from various locations and the reliance on specific individuals for the tasks. After the introduction, the input and checking of FB data, which used to take 2 to 3 hours, can now be completed in just 5 minutes. Additionally, the mindset of the accounting department, which was previously reliant on manual entry, has changed. [Case Overview] ■ Challenges before introduction - Dealing with "paper" sent from various locations, reliance on specific individuals ■ Key points of introduction - A robust support system for setup and operation - Easy to start from a small scale both financially and functionally *For more details, please refer to the related links or feel free to contact us.

Sep 26, 2025

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【Wandering Prevention】 "Nurse Call Linked Wireless Series" Prevents tripping and disconnection caused by cords!

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The facility operating the nurse call system has made the bed exit sensor wireless, allowing it to notify in conjunction with the nurse call. By simply connecting the mat sensor "Foldable Thin Matt-kun," the body movement call "Ugo-kun," and the wheelchair body movement call "Ayumi-chan" to the transmitter HB-RS, you can make the bed exit sensor wireless. The infrared sensor "Just Place Pole-kun" has the transmitter HB-RS built-in. 【Features】 ○ Wireless conversion by simply connecting existing sensors to the transmitter HB-WSK. ○ The bed exit sensor notifies wirelessly in conjunction with the nurse call. ○ Up to 5 transmitters can be registered with one receiver. ○ The communication distance between the transmitter and receiver is approximately 10 meters. ◎ For more details, please contact us or download the catalog.

Sep 26, 2025

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Full and Empty Management (Medium to Large Scale)

Parking lot occupancy management vehicle detection sensor | Hotron Co., Ltd.

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Full and empty management refers to the real-time display of parking availability and the management of efficient use of parking spaces. By utilizing Hotron's sensors, drivers can quickly discover available parking spaces, achieving efficient parking lot operations. ■ For large parking lots, the "floor management method" and "block management method," which focus on cost reduction, are recommended. Sensors are installed at regular intervals to count the number of vehicles passing through. This method offers the advantage of easy installation and low costs. 【Target Products】 - Vehicle Count Sensor CCS2 - Ultrasonic Sensor HM-UX2/UW2 ■ For smaller scale operations, the "space management method," which installs sensors in each parking space to display availability with high accuracy, is recommended. By ensuring accurate full and empty displays, it helps prevent unnecessary entry of new vehicles and enables safe parking lot operations. 【Target Products】 - Occupancy Detection Sensor HM-UX2/UW2 - Occupancy/Pass Detection Sensor HM-LC6 - Occupancy Detection Sensor HM-LC7/LC7-FLS - Occupancy/Pass Detection Sensor HM-S6 - Occupancy Detection Sensor HM-S8

Sep 26, 2025

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Non-contact light touch sensor "HA-T401/HA-T520"

A non-contact light touch sensor "HA-T Series" that realizes "wanting to open in a narrower range and in a limited manner" based on the surrounding environment of automatic doors.

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  • PRODUCT

The non-contact beam touch sensor "HA-T401/HA-T520" has a compact detection range, making it an ideal automatic door sensor for installation on automatic doors facing narrow corridors or busy streets. Depending on the application and installation location, you can choose between "non-vision mounting type" and "non-vision built-in type." 【Features】 ● With the beam touch sensor, you can open and close the automatic door simply by bringing your hand close without touching it, ensuring hygiene. ● Depending on the installation environment, such as single sliding or bi-parting doors, the detection range can be set in four configurations: left, center, right, and a total of 12 spots. ● Two types of activation row settings are available to reduce unnecessary opening and closing of the automatic door due to cross traffic, contributing to energy-saving effects. ● The touch switch and infrared sensor are integrated, allowing for a switch between beam touch and infrared sensor with a single model. 【Recommended for such locations!】 ☑ Entrance facing a busy corridor ☑ Counter or sign near the door ☑ Buildings facing narrow corridors ☑ Buildings that prioritize aesthetics ☑ Hospitals and facilities that consider hygiene ☑ Large facilities with many doors ◎ For more details, please download the materials or contact us.

Sep 25, 2025

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HK-2

Recommended for earthquake measures for automatic doors and equipment! Seismic device HK-2.

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Japan is one of the top 10 countries in the world with frequent earthquakes. The 2020 White Paper on Land, Infrastructure, Transport and Tourism has also reported an increase in the probability of major earthquakes occurring. Regarding the Nankai Trough earthquake, the probability of an earthquake with a magnitude of 8 to 9 occurring within the next 30 years is estimated to be 70 to 80%. At Hotron, we recommend the introduction of seismic devices for earthquake countermeasures in buildings and equipment. The seismic device 'HK-2' is a product that automatically performs various controls that have been pre-set when it detects strong shaking equivalent to a seismic intensity of 5 lower or higher. For example, it can automatically execute actions such as: "Open automatic doors and gates to secure evacuation routes and access for emergency vehicles" "Transmit signals to the control room and stop facility equipment" "Unlock the keys to locked lockers" "Automatically play voice guidance" For more details, please download the materials or contact us.

Sep 25, 2025

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