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  6. Observation of thermal deformation using a 3D shape measurement machine (VR-6200)

Observation of thermal deformation using a 3D shape measurement machine (VR-6200)

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last updated:Jun 05, 2025

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By combining the VR-6200 with the heater stage, it becomes possible to visualize changes during heating.

It is a measuring instrument that can non-contact measure surface shapes such as concavities, undulations, and surface roughness. We will introduce "Heating Deformation Observation" using a 3D shape measuring device. First, we acquire a 3D texture image at room temperature, and then we acquire a 3D texture image in a heated state. By overlaying the texture images before and after heating and checking the differential texture image and cross-sectional profile, it can be seen that the substrate in the heated state has higher ends and a lower center compared to the room temperature state. 【Features】 ■ It is possible to visualize and confirm shape changes during heating. ■ Depending on your preferences, it is possible to create profiles for temperature rise speed, waiting time, and temperature settings. *For more details, please download the PDF or feel free to contact us.

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VR6200

Observation of thermal deformation using a 3D shape measurement machine (VR-6200)

VR6200 heaterstage.png
VR6200 heaterstage.png
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Observation of thermal deformation using a 3D shape measurement device (VR-6200)

Observation of thermal deformation using a 3D shape measurement device (VR-6200)

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One-shot 3D shape measuring device 'VR-6200'

One-shot 3D shape measuring device 'VR-6200'

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Roundness / Circularity Measurement

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Observation of substrate deformation using a 3D shape measurement device (VR-6200)

Observation of substrate deformation using a 3D shape measurement device (VR-6200)

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Observation of thermal deformation using a 3D shape measurement device (VR-6200)

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It is a measuring instrument that can non-contact measure surface shapes such as concavities, undulations, and surface roughness. We will introduce "Heating Deformation Observation" using a 3D shape measuring machine. First, we acquire a 3D texture image at room temperature, and then we acquire a 3D texture image in a heated state. By overlaying the texture images before and after heating and checking the differential texture image and cross-sectional profile, it can be seen that the substrate in the heated state has higher ends and a lower center compared to the room temperature state. 【Features】 ■ It is possible to visualize and confirm shape changes during heating. ■ Profiles can be created according to your preferences, such as temperature rise speed, waiting time, and temperature settings.

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Aites was established in 1993, originating from the quality assurance department of the IBM Japan Yasu office. Based on the technical expertise cultivated through cutting-edge defect analysis and reliability assurance of electronic components at the IBM Japan Yasu office, we have provided various products and services that support the development and manufacturing of semiconductors, displays, organic EL, solar cells, and electronic components to customers both domestically and internationally.

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