Measurement of HF, HCl, and NH3 is possible! High-precision and highly reliable rack-mounted analyzer.
The "OA-ICOS(TM) GLA231 series" is an industrial trace gas analyzer that meets customer requirements with high sensitivity, high accuracy, and short response times. It is easy to use, starts up in a few minutes, and does not require calibration in the field. Maintenance required for preventive care is also minimal. 【Features】 ■ Capable of measuring single or multiple components of HF, HCl, and NH3 ■ Accurate and precise H2O measurements can also be performed simultaneously ■ Standard: 0-5V and 4-20mA analog output, Optional: Modbus(TM) TCP ■ High-performance and optimized data processing functions aimed at measuring sub-ppb concentrations ■ Touchscreen digital display showing gas concentration and the status of the analyzer *For more details, please refer to the PDF document or feel free to contact us.
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【Other Features】 ■ Password protection function for analyzers and data security ■ Option to select customizable calibration and performance certificate packages ■ Zero air treatment function for measuring targets during the process under highly reliable and optimized conditions *For more details, please refer to the PDF document or feel free to contact us.
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【Purpose】 ■ Monitoring of FOUP (Front Opening Unified Pod) and deposition chamber ■ Monitoring of airborne molecular contamination (AMC) for the health and safety of semiconductor FAB processes and operators *For more details, please refer to the PDF document or feel free to contact us.
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ABB is a technology leader in electrification and automation, aiming to create a more sustainable and resource-efficient future. ABB's solutions combine engineering expertise with software to optimize the ways of manufacturing, mobility, power supply, and their operations. Based on over 140 years of excellence, approximately 105,000 employees at ABB are dedicated to driving innovations that accelerate industrial transformation. ABB Japan: It is a corporate group consisting of three companies: ABB Ltd., ABB Japan B.V., and B&R Industrial Automation.