A compact vacuum deposition device capable of clean film formation! It is equipped with a shutter, allowing for stable deposition!
The "HVE-100" is a compact vacuum deposition device that saves space. The substrate deposition surface is oriented downward, and the configuration allows for upward deposition through evaporation from a resistance heating source (deposition up). It is equipped with a shutter, enabling stable deposition. 【Features】 ■ High vacuum exhaust system: Achieves a vacuum level of <10^-4Pa for clean film formation ■ The chamber is made of SUS for easy maintenance, with anti-deposition plates arranged inside ■ Space-saving/compact design: Desktop model with dimensions of W500×D395mm ■ Compatible with your existing exhaust system and film thickness gauge *For more details, please refer to the PDF document or feel free to contact us.
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【Other Features】 ■ Resistance Heating Evaporation Source - The nickel-plated copper electrodes eliminate the need for oxidation suppression tools, making the replacement of the deposition boat easy. - In addition to the boat, it is also possible to attach filaments. ■ Substrate Holding Mechanism - The Φ70 sample stage is installed with a hatch-type chamber lid, making sample exchange easy. - An optional heating/cooling mechanism can be implemented. ■ Deposition Shutter - A manual linear shutter mechanism allows for control of film deposition start/stop at any stable current value. *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Our company is engaged in the design, manufacturing, sales, and coordination of vacuum equipment and scientific instruments. Leveraging our long-standing technical expertise and information capabilities at the forefront of vacuum and scientific research, we provide support to our customers.