For semiconductor manufacturing equipment! Actuator 'Voice Coil Motor'

For semiconductor devices requiring position, pressure control, and high-speed drive! Lightweight, high-speed, and high-precision actuators.

The "Voice Coil Motor (VCM)" manufactured and sold by Shin Denko Mechatronics is an actuator that enables high-precision and high-speed control. It is suitable for integration into semiconductor devices that require precise position control, pressure control, and high-speed drive. The VCM has a lightweight movable part consisting only of a coil, in contrast to solenoids with heavy iron cores, which results in excellent responsiveness and the ability to operate at high speeds. Additionally, it is less affected by the bending of the iron core's magnetization curve even when the current increases, allowing it to demonstrate a very linear and favorable proportional relationship. 【Features】 ■ Lightweight movable part with high-speed response ■ Bidirectional output ■ Small inductance with good controllability ■ Cogging-free and smooth operation ■ Extremely good linearity between thrust and drive current *For more details, please download the PDF or feel free to contact us.

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