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  6. Fully Automatic CMP Device 'MGP-808XJ'

Fully Automatic CMP Device 'MGP-808XJ'

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last updated:Nov 22, 2022

ミクロ技研 本社
ミクロ技研 本社
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Dry in / dry out is possible! Equipment for mirror finishing of silicon wafers.

The "MGP-808XJ" is a fully automatic CMP device that is the successor to the Lap Master SFT's "LGP-808XJ." It adopts a newly developed head from our company, achieving improvements in GBIR and SFQR on the wafer surface. The transport method is either edge clamp or edge contact. Additionally, it allows for dry in/dry out capabilities through integration with a cleaning machine. 【Features】 ■ Successor model to the Lap Master SFT's "LGP-808XJ" ■ Achieves improvements in GBIR and SFQR on the wafer surface ■ High throughput with 8 polishing heads and 3 polishing plates ■ All transport systems utilize either edge clamp or edge contact methods ■ Allows for dry in/dry out capabilities through integration with a cleaning machine *For more details, please refer to the PDF document or feel free to contact us.

    Manufacturing Equipment
MGP-808XJ.jpg

Fully Automatic CMP Device 'MGP-808XJ'

MGP-808XJ.jpg
MGP-808XJ.jpg
  • Related Link - https://www.micro-eng.co.jp/product/gandp/polishin…

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basic information

For more details, please refer to the PDF document or feel free to contact us.

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【Usage】 ■ For mirror finishing of silicon wafers *For more details, please refer to the PDF document or feel free to contact us.

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ミクロ技研

ミクロ技研 本社

Building materials, supplies and fixtures manufacturers

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Micron Technology Co., Ltd. has been engaged in the manufacturing and sales of manufacturing equipment for electronic components and chemical products that support science and technology since its establishment. Moving forward, we aim to continue refining new technologies through collaboration among industry, academia, and government, with a focus on the environment, creating new value, leveraging our overseas networks, promoting global standards, and contributing, even in a small way, to the improvement of living culture.

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